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Reconstructing the energy spectra of backscattered electrons with allowance for the spectrometer’s response function

  • N. A. Koshev
  • N. A. Orlikovskii
  • E. I. RauEmail author
  • A. G. Yagola
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics

Abstract

The inverse problem of reconstructing the true spectrum of electrons backscattered from massive and layered targets with allowance for the spread function of the toroidal sector energy analyzer and for the response function of the spectrometer’s electron detector is solved. We present the results from studying the energy spectra of a number of homogeneous samples and film-on-substrate systems obtained at different energies of the irradiating electron beam at normal incidence of the electrons on the surface, and at a 45° angle of backscattered electron detection.

Keywords

Backscatter Electron Energy Analyzer Micro Channel Plate Spectrum Reconstruction Backscatter Electron Detection 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Allerton Press, Inc. 2012

Authors and Affiliations

  • N. A. Koshev
    • 1
  • N. A. Orlikovskii
    • 2
  • E. I. Rau
    • 1
    • 3
    Email author
  • A. G. Yagola
    • 1
  1. 1.Moscow State UniversityMoscowRussia
  2. 2.Moscow Institute of Physics and TechnologyRussian Academy of SciencesMoscowRussia
  3. 3.Institute of Microelectronics Technology and High Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia

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