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Bulletin of the Russian Academy of Sciences: Physics

, Volume 76, Issue 9, pp 1009–1011 | Cite as

Determining the young modulus of nanosize thickness coatings for MEMS from the results of static force spectroscopy

  • S. O. AbetkovskayaEmail author
  • S. A. Chizhik
  • I. V. Pogoskaya
  • Z. Rimuza
  • D. Yazhabek
  • M. Mikhalovski
  • Ya. Linke
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics

Abstract

A method for the nanoidentation of resistance coatings 1–100 nm thick and intended for use in microelectromechanical systems is proposed on the basis of atomic-force microscopy (AFM). The elastic moduli of the coatings are determined using three models of contact: the Hertz model, the Johnson-Kendall-Roberts model and the Makushkin model, with and without allowance for the influence of a solid substrate.

Keywords

Elastic Modulus Atomic Force Microscopy PMMA Young Modulus Contact Model 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Allerton Press, Inc. 2012

Authors and Affiliations

  • S. O. Abetkovskaya
    • 1
    Email author
  • S. A. Chizhik
    • 1
  • I. V. Pogoskaya
    • 1
  • Z. Rimuza
    • 2
  • D. Yazhabek
    • 2
  • M. Mikhalovski
    • 2
  • Ya. Linke
    • 2
  1. 1.A.V. Lykov Heat and Mass Transfer InstituteNational Academy of Sciences of BelarusMinskRussia
  2. 2.Institute of Micromechanics and PhotonicsWarsaw University of TechnologyWarsawPoland

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