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Theoretical and experimental determination of the initial stage of plastic relaxation of misfit stresses in a (111) substrate-film islands heterosystem

  • Proceedings of the International Symposium “Ordering in Minerals and Alloys” (OMA-14)
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A model for determining the critical thickness of a film h c is developed to introduce misfit dislocations in the slip planes of a film and a substrate parallel to the interphase boundary (111). Experimental values h c that agree with calculated values are determined for the Ge/Si(111) and Si3N4/Ge(111) heterosystems. The two-level epitaxial growth of Ge on Si is attained in the regime of combining the step-layer and 2D island growth mechanisms.

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References

  1. Matthews, J.W., Blakeslee, A.E.J., and Mader, S., Thin Solid Films, 1976, vol. 33, p. 253.

    Article  ADS  Google Scholar 

  2. Trukhanov, E.M., Loshkarev, I.D., Romanyuk, K.N., et al., Stress State and Dislocation Structure of Heterosystems, in Trudy pervogo mezhdunar. simp. “Kristallografiya fazovykh perekhodov pri vysokikh davleniyakh i temperaturakh” (CPT HP&T) (Proc. 1st Int. Seminar “Crystallography of Phase Transitions under High Pressures and Temperatures” (CPT HP&T)), Rostovon-Don-Loo, June 9–13, 2011.

  3. Gorokhov, E.B., Noskov, A.G., Stenin, S.I., and Trukhanov, E.M., Mikroelektronika, 1983, vol. 12, p. 200.

    Google Scholar 

  4. Trukhanov, E.M. and Stenin, S.I., Phys. Status. Solidi A, 1981, vol. 66, p. 591.

    Article  ADS  Google Scholar 

  5. Babenkova, S.L. and Trukhanov, E.M., Poverkhnost’, 1989, no. 8, p. 59.

  6. Richter, H., J. Appl. Phys., 1994, vol. 75, p. 657.

    Article  ADS  Google Scholar 

  7. Hirth, J.P. and Lothe, J., Theory of Dislocations, New York: McGraw-Hill, 1968; Moscow: Atomizdat, 1972.

    Google Scholar 

  8. Teys, S.A., Trukhanov, E.M., Il’in, A.S., et al., JETP Lett., 2010, vol. 92, p. 388.

    Article  ADS  Google Scholar 

  9. Paul, N., Asaoka, H., and Voightlander, B., Surf. Sci., 2004, vol. 564, p. 187.

    Article  ADS  Google Scholar 

  10. Trukhanov, E.M., Stenin, S.I., and Noskov, A.G., Phys. Status. Solidi A, 1979, vol. 53, p. 433.

    Article  ADS  Google Scholar 

  11. Teys, S.A., Kachanova, M.M., Il’in, A.S., et al., Trudy 2-go Mezhdunar. simp. “Fizika nizkorazmernykh sistem i poverkhnostei” (LDS-2) (Proc. 2nd Int. Symp. “Physics of Low-Temperature Systems and Surfaces” (LDS-2)), Rostov-on-Don-Loo, Sept. 3–8, 2010, p. 111.

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Authors and Affiliations

  1. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    I. D. Loshkarev, E. M. Trukhanov, K. N. Romanyuk & M. M. Kachanova

Authors
  1. I. D. Loshkarev
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  2. E. M. Trukhanov
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  3. K. N. Romanyuk
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  4. M. M. Kachanova
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Corresponding author

Correspondence to E. M. Trukhanov.

Additional information

Original Russian Text © I.D. Loshkarev, E.M. Trukhanov, K.N. Romanyuk, M.M. Kachanova, 2012, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2012, Vol. 76, No. 3, pp. 425–428.

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Loshkarev, I.D., Trukhanov, E.M., Romanyuk, K.N. et al. Theoretical and experimental determination of the initial stage of plastic relaxation of misfit stresses in a (111) substrate-film islands heterosystem. Bull. Russ. Acad. Sci. Phys. 76, 374–377 (2012). https://doi.org/10.3103/S1062873812030185

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  • DOI: https://doi.org/10.3103/S1062873812030185

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