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New principles of designing multibeam electron-optical microsystems for diagnostics of semiconductor structures

  • Proceedings of the XXII Russian Conference on Electron Microscopy EM-2008
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A new approach to fabrication of diagnostic electron-optical systems of high (10–30 nm) and ultrahigh (to 2 nm) resolution for defect inspection of large-diameter semiconductor wafers is proposed. Electron optical calculation of electron-optical systems with different configurations is performed. The efficiency of using thin films for increasing quality of electron-optical systems is estimated.

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References

  1. Chang, T.H.P., Thompson, M.G.R., Yu, M.L., et al., SPIE, 1995, vol. 2522, p. 4 (invited paper).

    Article  ADS  Google Scholar 

  2. Kim, H.S., Ahn, S., Kim, D.W., et al., J. Korean Phys. Soc., 2006, vol. 49, p. S712.

    Google Scholar 

  3. Kim, H.S., Kim, D.W., Ahn, Se, et al., J. Korean Phys. Soc., 2006, vol. 45, no. 5, p. 1214.

    Google Scholar 

  4. Kazmiruk, V.V., in Proc. XXII Russ. Conf. on Electron Microscopy, Chernogolovka, 2008, p. 96.

  5. Kazmiruk, V.V. and Savitskaja T.N.; http://xxx.lanl.gov/abs/0805.0248

  6. Kazmiruk, V.V. and Savitskaja T.N.; http://xxx.lanl.gov/abs/0805.0248

  7. Kazmiruk, V.V., in Proc. XXII Russ. Conf. on Electron Microscopy, Chernogolovka, 2008, p. 95.

  8. Van Aken, R.H., Lenc, M., and Barth, J.E., Nucl. Instrum. Methods Phys. Res. A, 2004, vol. 519, p. 205; 2004, vol. 527, p. 660.

    Article  ADS  Google Scholar 

  9. Aristov, V.V., Kazmiruk, V.V., Kudryashov, V.A., et al., Surface Sci., 1998, vol. 337, p. 402.

    Google Scholar 

  10. Van Aken, R.H., Janssen, M.A.P.M., Hagen, C.W., and Kruit, P., Solid State Electron., 2001, vol. 45, p. 1033.

    Article  ADS  Google Scholar 

  11. Van Aken, R.H., Hagen, C.W., Barth, J.E., and Kruit, P., Ultramicroscopy, 2002, vol. 93, p. 321.

    Article  Google Scholar 

Download references

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Correspondence to V. V. Kazmiruk.

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Original Russian Text © V.V. Kazmiruk, T.N. Savitskaja, 2009, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2009, Vol. 73, No. 4, pp. 485–488.

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Kazmiruk, V.V., Savitskaja, T.N. New principles of designing multibeam electron-optical microsystems for diagnostics of semiconductor structures. Bull. Russ. Acad. Sci. Phys. 73, 461–464 (2009). https://doi.org/10.3103/S1062873809040042

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  • DOI: https://doi.org/10.3103/S1062873809040042

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