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First Russian standards in nanotechnology

  • Proceedings of the XXII Russian Conference on Electron Microscopy EM-2008
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope


The problem of ensuring uniformity of measurements in nanotechnology is discussed. A functional block diagram is developed for length unit size transfer from the primary length standard (meter) to the nanometric range. The first six Russian national standards are presented, which ensure this transfer using scanning electron and atomic force microscopes.

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  1. National Technology Initiative. The Initiative and Its Implementation Plan, Subcommittee on Nanoscience, Engineering and Technology, 2000;

  2. Fedorin, V.L., Rossiiskaya metrologicheskaya entsiklopediya (Russian Metrological Encyclopedia), St. Petersburg: Izd-vo “Liki Rossii,” 2001.

    Google Scholar 

  3. Kalendin, V.V., Chernyakov, V.N., Todua, P.A., and Zhelkovaev, Zh., Proc. 9th Int. Precision Engineering Seminar, Germany, 1997, p. 138.

  4. Darznek, S.A., Zhelkobaev, Zh., Kalendin, V.V., and Novikov, Yu.A., Trudy IOFAN, 2006, vol. 62, p. 14.

    Google Scholar 

  5. Volk, Ch.P., Gornev, E.S., Novikov, Yu.A., et al., Mikroelektronika, 2002, vol. 31, no. 4, p. 243.

    Google Scholar 

  6. Novikov, Yu.A., Rakov, A.V., and Todua, P.A., Proc. SPIE, 2006, vol. 6260, 626015-1.

  7. Novikov, Yu.A., Ozerin, Yu.V., Plotnikov, Yu.I., et al., Trudy IOFAN, 2006, vol. 62, p. 121.

    Google Scholar 

  8. Mery rel’efnye nanometrovogo diapazona. Trebovaniya k geometricheskim formam, lineinym razmeram i vyboru materiala dlya izgotovleniya: GOST R 8.628-2007 (Nanometer Range Relief Measures. Requirements for Geometrical Shapes, Linear Sizes, and Manufacturing Material Selection: State Standard R 8.628-2007), Moscow: Standartinform, 2007.

  9. Mery rel’efnye nanometrovogo diapazona s trapetseidal’nym profilem elementov. Metodika poverki: GOST R 8.629-2007 (Nanometer Range Relief Measures with Trapezoidal Profile of Elements. Methods for Verification: State Standard R 8.629-2007), Moscow: Standartinform, 2007.

  10. Mikroskopy skaniruyushchie zondovye atomno-silovye izmeritel’nye. Metodika poverki: GOST R 8.630-2007 (Atomic-Force Scanning Probe Measuring Microscopes. Methods for Verification: State Standard R 8.630-2007), Moscow: Standartinform.

  11. Mikroskopy elektronnye rastrovye izmeritel’nye. Metodika poverki: GOST R 8.631-2007 (Scanning Electron Measuring Microscopes. Methods for Verification: State Standard R 8.631-2007), Moscow: Standartinform, 2007.

  12. Mikroskopy skaniruyushchie zondovye atomno-silovye. Metodika kalibrovki: GOST R 8.635-2007 (Atomic-Force Scanning Probe Measuring Microscopes. Methods for Calibration: State Standard R 8.635-2007), Moscow: Standartinform, 2008.

  13. Mikroskopy elektronnye rastrovye. Metodika kalibrovki: GOST R 8.636-2007 (Scanning Electron Measuring Microscopes. Methods for Calibration: State Standard R 8.636-2007), Moscow: Standartinform, 2008.

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Correspondence to Yu. A. Novikov.

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Original Russian Text © V.P. Gavrilenko, E.N. Lesnovsky, Yu.A. Novikov, A.V. Rakov, P.A. Todua, M.N. Filippov, 2009, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2009, Vol. 73, No. 4, pp. 454–462.

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Gavrilenko, V.P., Lesnovsky, E.N., Novikov, Y.A. et al. First Russian standards in nanotechnology. Bull. Russ. Acad. Sci. Phys. 73, 433–440 (2009).

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