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First Russian standards in nanotechnology

  • Proceedings of the XXII Russian Conference on Electron Microscopy EM-2008
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The problem of ensuring uniformity of measurements in nanotechnology is discussed. A functional block diagram is developed for length unit size transfer from the primary length standard (meter) to the nanometric range. The first six Russian national standards are presented, which ensure this transfer using scanning electron and atomic force microscopes.

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Correspondence to Yu. A. Novikov.

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Original Russian Text © V.P. Gavrilenko, E.N. Lesnovsky, Yu.A. Novikov, A.V. Rakov, P.A. Todua, M.N. Filippov, 2009, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2009, Vol. 73, No. 4, pp. 454–462.

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Gavrilenko, V.P., Lesnovsky, E.N., Novikov, Y.A. et al. First Russian standards in nanotechnology. Bull. Russ. Acad. Sci. Phys. 73, 433–440 (2009). https://doi.org/10.3103/S1062873809040017

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  • DOI: https://doi.org/10.3103/S1062873809040017

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