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Fragmentation of sputtered Si n O + m clusters: Release kinetic and dissociation energies

  • Proceedings of the XVIII International Conference “Interaction of Ions with Surface”
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The spectra of kinetic energies of positive Si n O + m cluster ions (n = 2–5, m = 2–7) have been measured using a double focusing ion microanalyzer with reverse geometry at instants 10−5 to 10−4 s after emission. The dissociation energies have been determined within the evaporative ensemble model and the theory of unimolecular decay reactions. The results obtained are compared with the binding energies of neutral Si n O m clusters.

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Correspondence to N. Kh. Dzhemilev.

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Original Russian Text © N.Kh. Dzhemilev, S.F. Kovalenko, L.F. Lifanova, S.E. Maksimov, Sh.T. Khozhiev, 2008, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2008, Vol. 72, No. 7, pp. 962–966.

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Dzhemilev, N.K., Kovalenko, S.F., Lifanova, L.F. et al. Fragmentation of sputtered Si n O + m clusters: Release kinetic and dissociation energies. Bull. Russ. Acad. Sci. Phys. 72, 910–914 (2008). https://doi.org/10.3103/S1062873808070095

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  • DOI: https://doi.org/10.3103/S1062873808070095

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