Abstract
We discuss an optimization of a nanooptical transmission spectral filter. The structure designed takes into account that the filter is to be subsequently fabricated by nanoimprint lithography. The optimization of the filter is conducted on a computing cluster by means of the parallel asynchronous stochastic technique. The analysis of the designed nanostructure fabrication errors peculiar to the nanoimprint lithography is offered.
Similar content being viewed by others
References
Guo, L.J., Progress in nanoimprint technology and its applications, J. Phys. D: Appl. Phys., 2004, pp. 123–141.
Yoon, Y.T., Lee, H.S., Lee, S.S., Kim, S.H., Park, J.D., and Lee, K.D., Color filter incorporating a subwavelength patterned grating in poly silicon, Optics express, 2008, vol. 16, no. 4.
Cho, E.H., Kim, H.S., Cheong, B.H., Prudnikov, O., Xianyua, W., Sohn, J.S., Ma, D.J., Choi, H.Y., Park, N.C., and Park, Y.P., Two-dimensional photonic crystal color filter development, Optics express, 2009, vol. 17, no. 10.
Kanamori, Y., Shimono, M., and Hane, K., Fabrication of Transmission Color Filters Using Silicon Subwavelength Gratings on Quartz Substrates, IEEE photonics technology letters, 2006, October 15, vol. 18, no. 20.
Ye, Y., Zhou, Y., and Chen, L., Color filter based on a two-dimensional submicrometer metal grating, Applied optics, 2009, vol. 48, no. 27.
Magnusson, R. and Wang, S.S., New principle for optical filters, Appl. Phys. Lett., 1992, vol. 61, pp. 1022–1024.
Moharam, M.G., Pommet, D.A., and Grann, E.B., Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach, J. Opt. Soc. Am. A., 1995, May, vol. 12, no. 5, pp. 1077–1086.
Peng, S. and Morris, G.M., Efficient implementation of rigorous coupled-wave analysis for surface-relief gratings, J. Opt. Soc. Am. A., 1995, vol. 12, no. 5, pp. 1087–1096.
Li, L., Use of Fourier series in the analysis of discontinuous periodic structures, J. Opt. Soc. Am. A., 1996, vol. 13, no. 9, pp. 1870–1876.
Babin, S., Doskolovich, L., Ishibashi, Y., Ivanchikov, A., Kazanskiy, N., Kadomin, I., Mikami, A., Yamazaki, Y., SCATT: software to model scatterometry using the rigorous electromagnetic theory, Proc. SPIE., 2009, vol. 7272, Advanced Lithography, pp. 72723X, DOI:10.1117/12.816904.
Bezus, E.A., Doskolovich, L.L., Kazanskiy, N.L., Soifer, V.A., Kharitonov, S.I., Pizzi, M., and Perlo, P., Designing diffractive structures to focus the surface electromagnetic waves, Computer Optics, 2009, vol. 33, no. 2, pp. 185–192 (in Russian).
Kazanskiy, N.L., Serafimovich, P.G., and Kharitonov, S.I., Calculation of optimal crossings of the photonic crystal waveguides by a transfer matrix method, Izvestia of Samara Science Center RAS, 2002, vol. 4, no. 2, pp. 300–307 (in Russian).
Volotovsky, S.G., Kazanskiy, N.L., Popov, S.B., Serafimovich, P.G., Soifer, V.A., and Fursov, V.A., Aspects of developing parallel applications for computer optics and image processing, “Proc. Conf. “Telematica 2002”, St. Peterburg, 2002, pp. 163–165 (in Russian).
Kazanskiy, N.L., Mathematical Modeling of Optical Systems, Samara: SSAU, 2004, p. 240.
Shokooh-Saremi, M. and Magnusson, R., Particle swarm optimization and its application to the design of diffraction grating filters, Optics Letters, 2007, vol. 32, no. 8, pp. 894–896.
Koh, B.-I., George, A.D., Haftka, R.T., and Fregly, B.J., Parallel asynchronous particle swarm optimization, Int. J. Numer. Meth. Engng., 2006, vol. 67, pp. 578–595.
Brueck, S.R.J., Optical and Interferometric Lithography, Nanotechnology Enablers, Proc. IEEE, 2005, vol. 93, no. 10, pp. 1704–1721.
Author information
Authors and Affiliations
About this article
Cite this article
Kazanskiy, N.L., Serafimovich, P.G. & Khonina, S.N. Harnessing the guided-mode resonance to design nanooptical transmission spectral filters. Opt. Mem. Neural Networks 19, 318–324 (2010). https://doi.org/10.3103/S1060992X10040090
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.3103/S1060992X10040090