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Conductivity of Hafnium Oxide Films Obtained by Electron-Beam Sputtering

  • Condensed Matter Physics
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Moscow University Physics Bulletin Aims and scope

Abstract

Hafnium oxide films HfO\({}_{x}\) with a thickness of about 40 nm were obtained by electron beam sputtering at different oxygen flow rates in the chamber. The electrophysical properties of the films were studied in air and in a vacuum. It has been shown that the temperature dependences of film conductivity, measured in a vacuum in the temperature range from 20 to 180\({}^{\circ}\)C, have an activation character with an activation energy of 0.82\(\pm\) 0.02 eV. It is assumed that in the resulting films, charge transfer is determined by the activation of electrons into the conduction band from the donor level associated with oxygen vacancies. It was found that the conductivity of the films in air changes greatly with varying the oxygen flow, while in a vacuum, the conductivity is practically independent of the oxygen flow. This indicates significant differences in the surface properties of the films obtained at different oxygen flows in the chamber during the deposition process.

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ACKNOWLEDGMENTS

The authors express their gratitude to K.N. Garbuzov for assistance in manufacturing the samples.

Funding

The research was carried out with the support of the grant from the Russian Science Foundation no. 23-19-00268, https://rscf.ru/project/23-19-00268/.

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Authors and Affiliations

  1. Department of General Physics and Molecular Electronics, Faculty of Physics, Lomonosov Moscow State University, 119991, Moscow, Russia

    I. D Kuchumov, M. N Martyshov, A. S Ilyin, A. V Pavlikov, P. A Forsh & P. K Kashkarov

  2. Skolkovo Institute of Science and Technology, 121205, Moscow, Russia

    D. M Zhigunov

  3. Lebedev Physical Institute, Russian Academy of Sciences, 119991, Moscow, Russia

    A. S Ilyin & P. A Forsh

  4. National Research Center ‘‘Kurchatov Institute,’’, 123182, Moscow, Russia

    P. K Kashkarov

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  1. I. D Kuchumov
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  2. M. N Martyshov
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  3. D. M Zhigunov
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  4. A. S Ilyin
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Correspondence to I. D Kuchumov, M. N Martyshov or D. M Zhigunov.

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Kuchumov, I.D., Martyshov, M.N., Zhigunov, D.M. et al. Conductivity of Hafnium Oxide Films Obtained by Electron-Beam Sputtering. Moscow Univ. Phys. 79, 64–68 (2024). https://doi.org/10.3103/S0027134924700139

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  • DOI: https://doi.org/10.3103/S0027134924700139

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