Abstract
An analysis of both experimental and theoretical data on the study of preferential sputtering of nickel-based and copper-platinum alloys under ion beam bombardment has been carried out. Contrary to existing models, it has been shown that the main factor determining the process of preferential sputtering is the ratio of the surface binding energies of the components.
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ACKNOWLEDGMENTS
The author expresses gratitude to colleagues A.V. Nazarov and A.E. Ieshkin for their valuable discussions and assistance in preparing the manuscript.
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The research was carried out within the Russian Science Foundation Grant (project no. 21-19-00310).
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Chernysh, V.S. On Preferential Sputtering of Alloys under Ion Bombardment. Moscow Univ. Phys. 79, 14–19 (2024). https://doi.org/10.3103/S0027134924700085
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DOI: https://doi.org/10.3103/S0027134924700085