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Consideration of the Distribution of Noise Level by Wavelength in Broadband Control of the Optical Coating Deposition Process

  • Theoretical and Mathematical Physics
  • Published:
Moscow University Physics Bulletin Aims and scope

Abstract

In the study, numerical results of simulations for the deposition process of a complex optical coating are presented, utilizing broadband monitoring of this process in the case where the noise level in the measured transmittance coefficient has a nonuniform distribution across the wavelength. The influence on the accuracy of control data at the edges of the measured wavelength range, where the error in the transmittance coefficient is maximal, is investigated. It is shown that the removal of some data at the edges of the range almost does not change the self-compensation factor of the errors in the deposition process, while the average norm of the error vector in the layer thicknesses significantly decreases. Thus, for the first time, it is demonstrated that taking into account the effect of error self-compensation in broadband control opens the possibility of a reasonable choice of the optimal spectral range for practical optical control.

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ACKNOWLEDGMENTS

The authors thank B. Romanov and Yu. Prosovsky for providing data on the noise level in broadband measurements of the coating’s transmittance coefficient and for valuable consultations on issues of broadband control of the deposition process.

Funding

The work was carried out with the financial support of the Russian Science Foundation grant no. 21-11-00011.

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Authors and Affiliations

  1. Faculty of Computational Mathematics and Cybernetics, Shenzhen MSU-BIT University, 518172, Dayun New Town, Longgang District, P.R. China

    A. N. Sharov

  2. Research Computing Center, Lomonosov Moscow State University, 119991, Moscow, Russia

    S. A. Sharapova & A. V. Tikhonravov

  3. Department of Mathematics, Faculty of Physics, Lomonosov Moscow StateUniversity, 119991, Moscow, Russia

    A. G. Yagola

Authors
  1. A. N. Sharov
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  2. S. A. Sharapova
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  3. A. V. Tikhonravov
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  4. A. G. Yagola
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Corresponding author

Correspondence to A. N. Sharov.

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Sharov, A.N., Sharapova, S.A., Tikhonravov, A.V. et al. Consideration of the Distribution of Noise Level by Wavelength in Broadband Control of the Optical Coating Deposition Process. Moscow Univ. Phys. 79, 1–6 (2024). https://doi.org/10.3103/S0027134924700048

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  • DOI: https://doi.org/10.3103/S0027134924700048

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