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Estimates Related to the Error Self-Compensation Mechanism in Optical Coatings Deposition

  • OPTICS AND SPECTROSCOPY. LASER PHYSICS
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Moscow University Physics Bulletin Aims and scope

Abstract

This paper introduces an estimate for the strength of the correlation of layer thickness errors in the process of coating deposition with broadband optical monitoring. It is shown that a strong effect of self-compensation of deposition errors is observed in the case of a strong correlation of layer thickness errors. An estimate for the strength of this effect is introduced. Theoretical conclusions are confirmed by comparison with practical deposition results that demonstrate the presence of a strong self-compensation effect.

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ACKNOWLEDGMENTS

This study was supported by the Russian Science Foundation (RSF) for research project no. 16-11-10219.

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Authors and Affiliations

  1. Research Computer Center, Moscow State University, 119991, Moscow, Russia

    A. V. Tikhonravov, I. V. Kochikov & S. A. Sharapova

  2. Department of Physics, Moscow State University, 119991, Moscow, Russia

    I. A. Matvienko & A. G. Yagola

Authors
  1. A. V. Tikhonravov
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  2. I. V. Kochikov
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  3. I. A. Matvienko
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  4. S. A. Sharapova
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  5. A. G. Yagola
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Corresponding author

Correspondence to I. V. Kochikov.

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The article was translated by the authors.

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Tikhonravov, A.V., Kochikov, I.V., Matvienko, I.A. et al. Estimates Related to the Error Self-Compensation Mechanism in Optical Coatings Deposition. Moscow Univ. Phys. 73, 627–631 (2018). https://doi.org/10.3103/S0027134918060243

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  • DOI: https://doi.org/10.3103/S0027134918060243

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