Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology

Abstract—The paper presents the results of experiments on the formation of GPS-var structures using hydrofluoric acid (HF) electrolytes in solutions of ethyl (C2H5OH) and isopropyl alcohol (CH3CH(OH)CH3) at various component ratios. It was experimentally shown that the use of electrolytes based on CH3CH(OH)CH3 allows the formation of a GPS-var structure with a nanoporous layer of silicon, while the resulting porous layer does not collapse and is suitable for further use.

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Correspondence to K. I. Rubtsova or M. D. Silina.

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Translated by M.K. Katuev

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Gosteva, E.A., Rubtsova, K.I., Silina, M.D. et al. Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology. Mech. Solids 55, 103–107 (2020). https://doi.org/10.3103/S0025654420010094

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Keywords:

  • gradient-porous variable silicon structures
  • mechanical strength
  • anodic etching
  • disproportionation