Capacitive Motors with a High Specific Power Capacity

  • I. L. Baginsky
  • E. G. KostsovEmail author
Physical and Engineering Fundamentals of Microelectronics and Optoelectronics


A new class of capacitive motors based on nanometer gaps between the electrodes and possessing specific power capacity values much higher than that of inductive motors is described. Specific features of their operation are analyzed. The specific energy generated in a cycle of electromechanical conversion is estimated. The forces and powers of the considered motors are found to exceed the corresponding parameters of inductive motors by 2–3 orders of magnitude, which offers a possibility of using them in numerous applications.


electrostatics nanogap motor ferroelectric free metal film specific energy density 


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© Allerton Press, Inc. 2018

Authors and Affiliations

  1. 1.Institute of Automation and Electrometry, Siberian BranchRussian Academy of SciencesNovosibirskRussia

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