Study of the optical methods of formation of multilevel profile in the thin films of a hybrid photopolymer material based on thiol-siloxane and acrylate oligomers

  • N. G. MironnikovEmail author
  • V. P. Korolkov
  • D. I. Derevyanko
  • V. V. Shelkovnikov
Diffractive Optics


This paper describes a study of the optical methods for fabrication of multilevel profile in the layers of a Hybrimer-TATS hybrid photopolymer material based on thiol-siloxane and acrylate oligomers. Grayscale photolithography and direct laser writing are used to form multilevel structures 3.5 and 6 μ in height, respectively. The characteristic curves and photosensitivity of the material are determined. The film preparation and treatment processes are optimized, and it is determined that addition of the stages of pre- and post-exposure significantly affects the photosensitive properties of Hybrimer-TATS. The photopolymer is promising as a structural material for the formation of microstructured optical components.


hybrid photopolymer thiol-siloxane-acrylate oligomers laser writing photolithography multilevel diffractive structures characteristic curve 


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Copyright information

© Allerton Press, Inc. 2017

Authors and Affiliations

  • N. G. Mironnikov
    • 1
    • 2
    Email author
  • V. P. Korolkov
    • 1
    • 2
  • D. I. Derevyanko
    • 3
  • V. V. Shelkovnikov
    • 3
    • 4
  1. 1.Institute of Automation and Electrometry, Siberian BranchRussian Academy of SciencesNovosibirskRussia
  2. 2.Novosibirsk State UniversityNovosibirskRussia
  3. 3.N. N. Vorozhtsov Novosibirsk Institute of Organic Chemistry, Siberian BranchRussian Academy of SciencesNovosibirskRussia
  4. 4.Novosibirsk State Technical UniversityNovosibirskRussia

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