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Investigation of RF Originated ‘Cold’ Plasma Parameters in Capacitive Coupled Reactor

  • S. T. SargsyanEmail author
Article
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Abstract

We describe a capacitive coupled plasma reactor, where the inert gas molecules are ionized by the radio frequency radiation. The control and measurement system of electrical and optical parameters of the plasma are considered. A qualitative assessment is given of the energy distribution of charge carriers.

Keywords

‘Cold’ plasma plasma impedance capacitive plasma reactor 

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Copyright information

© Allerton Press, Inc. 2019

Authors and Affiliations

  1. 1.Institute of Radiophysics and ElectronicsNAS of ArmeniaAshtarakArmenia

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