Effect of Laser Exposure on the Process of Silicon Nanoparticle Fabrication
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Silicon nanoparticles are obtained by nanosecond laser ablation of a single-crystal wafer under a deionized water layer. Nanoparticle generation mechanisms are studied depending on the incident energy density of laser radiation (7–12 J/cm2) and scanning speed (10–750 mm/s). At a scanning speed of 150–200 mm/s, a maximum of the extinction coefficient of obtained colloidal solutions of nanoparticles is observed, which can be caused by an increase in their mass yield.
Keywordslaser ablation silicon nanoparticles
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- 1.G. P. Zograf, M. I. Petrov, and S. V. Makarov, J. Phys.: Conf. Ser. 929, 012072 (2017).Google Scholar