Journal of Superhard Materials

, Volume 37, Issue 2, pp 112–119 | Cite as

Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

  • V. S. AntonyukEmail author
  • S. O. Bilokin’
  • M. O. Bondarenko
  • Yu. Yu. BondarenkoEmail author
  • Yu. I. Kovalenko
Production, Structure, Properties


The possibility has been shown to modify silicon probes for atomic force microscopes by thin wear-resistant carbide coatings, which leads to the improvements of their operating properties (decreases the probability of appearing artifacts of scanning by 20–22% and increases the probes service life by 45–55%). Optimal conditions for the deposition of such coatings by thermal evaporation in a vacuum with a subsequent low-energy electron-beam microprocessing have been proposed. The quality of deposited coatings has been checked and the tests showed a decrease of the probe surface subroughness by a factor of 15–25 and increase of the microhardness and wear resistance of coatings by a factor of 1.1–1.35.


silicon probe atomic-force microscopy thin coating electron-beam microprocessing wear resistance 


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  1. 1.
    Mironov, V.L., Osnovy skaniruyushchei zondovoi microskopii (Principles of scanning probe microscopy), Nizhny Novgorod, RF: Institute of Physics of Microstructures, Russian Academy of Sciences, 2004.Google Scholar
  2. 2.
    Demchenko, A.P., Introduction to fluorescence sensing, Springer Science + Business Media B.V., 2009.Google Scholar
  3. 3.
    Bilokon’, C.A., Bondarenko, M.A., Andrienko, V.A., and Antonyuk, V.S., Studies of thin films microhardness by nanoindentation with the use of atomic force microscopy, Proc. 13th Int. Conf. on Quality, standardization, control: theory and practice, Yalta, Crimea, Ukraine: Sept. 30-Oct. 4, 2013, Kiev: 2013, pp. 20–21.Google Scholar
  4. 4.
    Antonyuk, V.S., Tymchyk, G.S., Vertsanova, O.V., et al., Mikroskopiya in nanotekhnologiyakh: monografiya (Microscopy in nanotechnologies: monograph), Kiev: NTUU KPI, 2014.Google Scholar
  5. 5.
    Vashchenko, V.A., Kanashevych, G.V., Bondarenko, M.O., et al., Tekhnologichni osnovy otrymannya metalizovanykh pokryttiv na vyrobakh mikrooptiky ta nanoelectroniky electronno-promenevym metodom (Technological principles of producing metallized coatings on microoptical and nanoelectronic products by electron-beam method), report on research (MESU) no. DR 0103U003689, Kiev, 2004.Google Scholar
  6. 6.
    Bondarenko, M.O., Study of the effect of low-energy electron flow on the surface microgeometry of piezoceramic elements, in Nauchnyi i proizvodstvenno-prakticheskii sbornik po tekhnicheskim i estestvennym naykam (Scientific and Industrial-Practical Collection on Technical and Natural Sciences), Odessa: Odessa Polytechnic University, 2009, issue 2 (32), pp. 149–153.Google Scholar
  7. 7.
    Antonyuk, V.S., Bondarenko, M.O., and Bondarenko, Yu.Yu., Studies of thin wear-resistant carbon coatings and structures formed by thermal evaporation in a vacuum on piezoceramic materials, J. Superhard Mater., 2012, vol. 34, no. 4, pp. 248–255.CrossRefGoogle Scholar
  8. 8.
    Ageev, O.A., Fedotov, A.A., and Smirnov, V.A., Metody formirovaniya struktur elementov nanoelektroniki i nanosistemnoi tekhniki: Uchebnoe posobie (Methods of the structure formation of elements of nanoelectronics and nanosystem techniques: tutorial), Taganrog, RF: izd. TTI, YuFU.Google Scholar

Copyright information

© Allerton Press, Inc. 2015

Authors and Affiliations

  1. 1.Kiev Polytechnic InstituteNational Technical University of UkraineKievUkraine
  2. 2.Cherkasy State Technological UniversityCherkasyUkraine

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