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Journal of Superhard Materials

, Volume 37, Issue 2, pp 112–119 | Cite as

Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

  • V. S. AntonyukEmail author
  • S. O. Bilokin’
  • M. O. Bondarenko
  • Yu. Yu. BondarenkoEmail author
  • Yu. I. Kovalenko
Production, Structure, Properties
  • 27 Downloads

Abstract

The possibility has been shown to modify silicon probes for atomic force microscopes by thin wear-resistant carbide coatings, which leads to the improvements of their operating properties (decreases the probability of appearing artifacts of scanning by 20–22% and increases the probes service life by 45–55%). Optimal conditions for the deposition of such coatings by thermal evaporation in a vacuum with a subsequent low-energy electron-beam microprocessing have been proposed. The quality of deposited coatings has been checked and the tests showed a decrease of the probe surface subroughness by a factor of 15–25 and increase of the microhardness and wear resistance of coatings by a factor of 1.1–1.35.

Keywords

silicon probe atomic-force microscopy thin coating electron-beam microprocessing wear resistance 

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Copyright information

© Allerton Press, Inc. 2015

Authors and Affiliations

  1. 1.Kiev Polytechnic InstituteNational Technical University of UkraineKievUkraine
  2. 2.Cherkasy State Technological UniversityCherkasyUkraine

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