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Angular and Energy Characteristics of Backscattered Electrons and Allowing for Them in the Three-Dimensional Visualization of Microstructures in Scanning Electron Microscopy

  • V. V. Zabrodsky
  • S. V. Zaitsev
  • V. Yu. Karaulov
  • E. I. RauEmail author
  • V. A. Smolyar
  • E. V. Sherstnev
Article

Abstract

The main angular characteristics and resulting semi-empirical equations for back-scattered electrons of medium energy (1–30 kV) are calculated. The results from an analysis are used to develop an optimized detector system of back-scattered electrons for scanning electron microscopes to visualize subsurface microstructures and improve topographic contrast. These results contribute to solving problems of the three-dimensional visualization of surface topography and selective tomography of the subsurface architecture of micro-objects.

Notes

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Copyright information

© Allerton Press, Inc. 2019

Authors and Affiliations

  • V. V. Zabrodsky
    • 1
  • S. V. Zaitsev
    • 2
  • V. Yu. Karaulov
    • 2
  • E. I. Rau
    • 2
    Email author
  • V. A. Smolyar
    • 3
  • E. V. Sherstnev
    • 1
  1. 1.Ioffe InstituteSt. PetersburgRussia
  2. 2.Moscow State UniversityMoscowRussia
  3. 3.Volgograd State UniversityVolgogradRussia

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