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Mass loss by SU-8 polymer under X-ray irradiation

  • V. Nazmov
  • A. Völker
  • T. Fischböck
  • J. Rothe
  • E. Huttel
Proceedings of the 20th National Conference on the Use of Synchrotron Radiation “SR-2014” and the National Youth Conference “Using Synchrotron Radiation”
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Abstract

The principal volatile products forming in air degradation of SU-8 polymer under influence of synchrotron radiation in the wavelength range of 2.5–0.25 Å have been studied. The material degradation products such as hydrogen, acrolein, acetone, allyl alcohol, benzene, and methyl formate have been identified, as well as atmospheric products. However, the most often products of outgassing are water and carbon oxide molecules, which contribute to the mass loss of the polymer irradiated.

Keywords

Mass Loss Rate Allyl Alcohol Methyl Formate Kapton Foil PGMEA 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Allerton Press, Inc. 2015

Authors and Affiliations

  • V. Nazmov
    • 1
  • A. Völker
    • 2
  • T. Fischböck
    • 2
  • J. Rothe
    • 3
  • E. Huttel
    • 2
  1. 1.Institute of Microstructure TechnologyKarlsruhe Institute of TechnologyKarlsruheGermany
  2. 2.Institute for Photon Science and Synchrotron RadiationKarlsruhe Institute of TechnologyKarlsruheGermany
  3. 3.Institute for Nuclear Waste DisposalKarlsruhe Institute of TechnologyKarlsruheGermany

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