Controlling the growth dynamics of carbon nanotips on substrates irradiated by a focused electron beam
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The dynamics of nanopillar growth on a variety of substrates as a result of the deposition of hydrocarbon molecules by a sharply focused electron beam is studied. The growth rate is found to depend strongly on the substrate’s material, thickness, and surface condition. The results are explained through the dissociation of adsorbed molecules by scattered and secondary electrons far from the point of beam incidence, thereby reducing the flow of diffusion to a nanotip’s peak.
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- 1.Utke, I., Moshkalev, S., and Russell, P., Nanofabrication Using Focused Ion and Electron Beam. Principles and Applications, Oxford, 2012.Google Scholar
- 4.Bret, T., Physico-chemical study of the focused electron beam induced deposition process, Ph.D. Thesis, Lausanne, 2005.Google Scholar
- 14.Zhdanov, G.S., Poverkhnost’, 1983, no. 1, p. 65.Google Scholar
- 19.Heide, H.G., Z. Angew. Phys., 1964, vol. 17, p. 70.Google Scholar