Kinetics of carbon nanopillar formation on a pyrolytic graphite surface during reactions induced by a focused electron beam

  • G. S. Zhdanov
  • A. D. Manukhova
  • T. V. Sharov
  • Y. V. Kapitonov
Proceedings of the XXIV Russian Conference on Electron Microscopy (SEM-2012)


The results from a series of height measurements of carbon nanopillars formed during residual hydrocarbon deposition on a pyrographite surface by a focused electron beam in an SEM are presented. The high initial velocity of the pillars’ vertical growth can be explained by the dominant role of surface diffusion in the influx of molecules to the irradiated area. It is shown that progressive contamination of the substrate at distances up to several micrometers from the point of impact of the primary beam delays growth, and, in the case of long-time exposure, results in the evaporation of the pillars.


Irradiate Area Vertical Growth Hydrocarbon Molecule Focus Electron Beam Surface Diffusion Coefficient 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    Utke, I., Hoffmann, P., and Melngailis, J., J. Vac. Sci. Technol. B, 2008, vol. 26, p. 1197.CrossRefGoogle Scholar
  2. 2.
    Zhdanov, G.S. and Vertsner, V.N., Dokl. Akad. Nauk SSSR, 1967, vol. 176, p. 1040.Google Scholar
  3. 3.
    Tripathi, S.K., Shukla, N., and Kulkarniv, V.N., Nanotecnol., 2008, vol. 19, p. 465302.ADSCrossRefGoogle Scholar
  4. 4.
    Ding, W., Dikin, D.A., Chen, X., et al., J. Appl. Phys., 2005, vol. 98, p. 014905.ADSCrossRefGoogle Scholar
  5. 5.
    Hollenshead, J. and Klebanoff, L., J. Vac. Sci. Technol. B, 2006, vol. 24, p. 64.CrossRefGoogle Scholar
  6. 6.
    Zhdanov, G.S., Poverkhn., 1983, no. 1, p. 65.Google Scholar
  7. 7.
    Rykaczewski, K., White, W.B., and Fedorov, A.G., J. Appl. Phys., 2007, vol. 101, p. 054307.ADSCrossRefGoogle Scholar
  8. 8.
    Rykaczewski, K., Marshall, A., White, W.B., and Fedorov, A.G., Ultramicroscopy, 2008, vol. 108, p. 989.CrossRefGoogle Scholar
  9. 9.
    Silvis-Cividjian, N., Hagen, C.W., Leunissen, L.H.A., and Kruit, P., Microelectron. Eng., 2002, vol. 61, p. 693.CrossRefGoogle Scholar
  10. 10.
    Toth, M., Lobo, Ch.J., Hartigan, G., and Knowles, W.R., J. Appl. Phys., 2007, vol. 101, p. 054309.ADSCrossRefGoogle Scholar
  11. 11.
    Luk’yanov, F.A., Rau, E.I., and Sennov, R.A., Bull. Russ. Acad. Sci. Phys., 2009, vol. 73, no. 4, p. 441.CrossRefGoogle Scholar

Copyright information

© Allerton Press, Inc. 2013

Authors and Affiliations

  • G. S. Zhdanov
    • 1
  • A. D. Manukhova
    • 1
  • T. V. Sharov
    • 1
  • Y. V. Kapitonov
    • 1
  1. 1.St. Petersburg State UniversitySt. PetersburgRussia

Personalised recommendations