Moscow University Physics Bulletin

, Volume 71, Issue 1, pp 87–90 | Cite as

The influence of the gas cluster ion beam composition on defect formation in targets

  • A. E. Ieshkin
  • A. A. Shemukhin
  • Yu. A. Ermakov
  • V. S. Chernysh
Radiophysics, Electronics, Acoustics


Defect formation in silicon-on-sapphire films under the action of a gas beam of 30 keV argon cluster ions is studied. Rutherford backscattering in the channeling mode is used to demonstrate the formation of a large number of defects in the volume of a specimen that is irradiated by a cluster ion beam without mass separation. If atomic and light cluster ions are removed from the beam, defect-free etching of the specimen occurs.


cluster ions silicon-on-sapphire sputtering amorphization smoothing RBS 


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  1. 1.
    I. Yamada, Appl. Surf. Sci. 310, 77 (2014). doi 10.1016/j.apsusc.2014.03.147ADSCrossRefGoogle Scholar
  2. 2.
    V. S. Chernysh, A. E. Ieshkin, and Yu. A. Ermakov, Appl. Surf. Sci. 326, 285 (2015). doi 10.1016/j.apsusc.2014.12.008ADSCrossRefGoogle Scholar
  3. 3.
    A. A. Shemukhin, Yu. V. Balakshin, V. S. Chernysh, et al., Tech. Phys. Lett. 38, 907 (2012). doi 10.1134/S1063785012100112ADSCrossRefGoogle Scholar
  4. 4.
    A. A. Shemukhin, A. V. Nazarov, Yu. V. Balakshin, and V. S. Chernysh, Nucl. Instrum. Methods Phys. Res., Sect. B 354, 274 (2015). doi 10.1016/j.nimb.2014. 11.090ADSCrossRefGoogle Scholar
  5. 5.
    A. A. Andreev, V. S. Chernysh, Yu. A. Ermakov, and A. E. Ieshkin, Vacuum 91, 47 (2013). doi 10.1016/j.apsusc.2014.12.008ADSCrossRefGoogle Scholar
  6. 6.
    A. E. Ieshkin, Yu. A. Ermakov, and V. S. Chernysh, Tech. Phys. Lett. 41, 1072 (2015).ADSCrossRefGoogle Scholar
  7. 7.
    www.simnra.comGoogle Scholar
  8. 8.
    www.srim.orgGoogle Scholar
  9. 9.
    T. Seki, T. Murase, and J. Matsuo, Nucl. Instrum. Methods Phys. Res., Sect. B 242, 179 (2006). doi 10.1016/j.nimb.2005.08.023ADSCrossRefGoogle Scholar
  10. 10.
    Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables 62, 149 (1996). doi 10.1006/adnd.1996.0005ADSCrossRefGoogle Scholar

Copyright information

© Allerton Press, Inc. 2016

Authors and Affiliations

  • A. E. Ieshkin
    • 1
  • A. A. Shemukhin
    • 2
  • Yu. A. Ermakov
    • 2
  • V. S. Chernysh
    • 1
    • 2
  1. 1.Department of PhysicsMoscow State UniversityMoscowRussia
  2. 2.Skobeltsyn Institute of Nuclear PhysicsMoscow State UniversityMoscowRussia

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