Skip to main content
Log in

Determination of Traces of Impurities in Molybdenum Disilicide by Inductively Coupled Plasma-Atomic Emission Spectrometry after Coprecipition

  • Published:
Analytical Sciences Aims and scope Submit manuscript

Abstract

Ten elements (Co, Cr, Cu, Fe, Mn, Ni, Ti, V, Zn and Zr) in molybdenum disilicide are quantitatively Coprecipition with lanthanum hydroxide. Sample treatment and effects of acids, pH and La are studied. Traces of impurities are determined by inductively coupled plasma-atomic emission spectrometry (ICP-AES) using matrix-matched calibration solutions.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Y. Umakoshi, T. Sakagami, T. Yamane and T. Hirano, Philos. Mag. Lett., 59A, 159 (1989)

    Article  Google Scholar 

  2. N. Lifshits and S. Luryi, Digest of Technical Papers, 1982 IEDM, p. 54.

    Google Scholar 

  3. S. P Murarka, Silisides for VLSI Applications, Academic Press, New York, 1983.

    Google Scholar 

  4. T. Hirano, M. Nakamura, K. Kimura and Y. Umakoshi, Proceedings of the 15th Annual Conference on Composite and Advanced Ceramics (American Ceramic Society), Cocoa Beach, Florida, U.S.A. January, 1991.

    Google Scholar 

  5. O. Thomas, J. P. Senateur, R. Madar. O. Laborde and E. Rosencher. Solid State Commun. 55, 629 (1985).

    Article  CAS  Google Scholar 

  6. H. Yamaguchi, ĩ, Kobayashi, K. Yamada and H. Okochi, Bunseki Kagaku, 39, 19 (1990).

    Article  CAS  Google Scholar 

  7. O. Kujirai, M. Kohri, K. Yamada and H. Okochi, Anal. Sci. 6, 379 (1990).

    Article  CAS  Google Scholar 

  8. O. Kujirai, K. Yamada, M. Kohri and H. Okochi, Fresenius J. Anal. Chem. 339, 133 (1991).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kujirai, O., Yamada, K., Kohri, M. et al. Determination of Traces of Impurities in Molybdenum Disilicide by Inductively Coupled Plasma-Atomic Emission Spectrometry after Coprecipition. ANAL. SCI. 7 (Suppl 1), 99–100 (1991). https://doi.org/10.2116/analsci.7.Supple_99

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.2116/analsci.7.Supple_99

Key words

Navigation