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Effects of Ion Optics on the Sensitivity Factors in Secondary Neutral Mass Spectrometry Measurements

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Abstract

The effects of the ion optics of the SNMS (secondary neutral mass spectrometry) INA-3 system on the intensity ratios, from which the relative sensitivity factors can be calculated, have been investigated for several III-V semiconductors: GaAs, GaP, and InP. It was found that the intensity ratios change significantly, depending on the electrode potentials of the ion optics and on the mass difference (ΔM) between the major constituent elements: within 90% regions of optimum electrode voltages and between ΔM=6 and 84 amu, the maximum total relative deviation of relative intensities increases from about 10% to 250%.

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Authors and Affiliations

  1. Analysis and Physical Properties Center, Showa Denko K. K, 2-24-25, Tamagawa, Ohta, Tokyo, 146, Japan

    Yoshikazu Kikuta

  2. Institut für Spektrochemie und Angewandte Spektroskopie (ISAS), Bunsen-Kirchoff-Str. 11, D-4600, Dortmund 1, Germany

    Holger Jenett

Authors
  1. Yoshikazu Kikuta
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  2. Holger Jenett
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Kikuta, Y., Jenett, H. Effects of Ion Optics on the Sensitivity Factors in Secondary Neutral Mass Spectrometry Measurements. ANAL. SCI. 7, 757–761 (1991). https://doi.org/10.2116/analsci.7.757

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  • DOI: https://doi.org/10.2116/analsci.7.757

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