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Vapor Introduction Method for Direct Determination of Phosphorus in Trichlorosilane by Inductively Coupled Plasma Atomic Emission Spectrometry

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Authors and Affiliations

  1. Analysis Research Department, Advanced Technology Research Center, NKK Corporation, Minamiwatarida, Kawasaki, 210, Japan

    Tadashi Mochizuki, Akiko Sakashita, Hideo Iwata & Takamasa Takahashi

Authors
  1. Tadashi Mochizuki
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  2. Akiko Sakashita
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  3. Hideo Iwata
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  4. Takamasa Takahashi
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Mochizuki, T., Sakashita, A., Iwata, H. et al. Vapor Introduction Method for Direct Determination of Phosphorus in Trichlorosilane by Inductively Coupled Plasma Atomic Emission Spectrometry. ANAL. SCI. 6, 303–305 (1990). https://doi.org/10.2116/analsci.6.303

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  • DOI: https://doi.org/10.2116/analsci.6.303

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