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Improvement of Detection Limits for Particle Contamination by Confocal Configuration in X-Ray Fluorescence Microscope

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Abstract

Micro X-ray fluorescence (XRF) enables the non-destructive analysis of particle contamination. In this study, we compared the detection sensitivities and the LLD (lower limit of detection) values of micro-metallic particle contaminations on the plastic detected by micro-XRF and confocal micro-XRF. First, to verify the effectiveness of the confocal microXRF, we compared the intensities of different shaping copper samples (plate, thin film and particle). The results demonstrated that confocal micro-XRF is more effective than micro-XRF for the detection of micro particles. Second, to compare the SN ratios of different X-ray energies, several micro-metallic particles (Si, Fe, and Cu) set on an acrylic plate were measured by micro-XRF and confocal micro-XRF. It was found that the SN ratios of the confocal micro-XRF when measuring the Si, Fe, and Cu particles were improved to be approximately 14.6, 21.9, and 43.5-times those of the microXRF, respectively. It was determined that confocal micro-XRF is more effective for micro-metallic particles in the higher energy region.

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Authors and Affiliations

  1. Analytical Technology Department, HORIBA TECHNO SERVICE Co., Ltd., 2 Kisshoin-Miyanohigashi-cho Minami, Kyoto, 601-8305, Japan

    Hitomi Nakano & Shintaro Komatani

  2. Department of Applied Chemistry & Bioengineering, Graduate School of Engineering, Osaka City University, 3-3-138 Sugimoto-cho Sumiyoshi, Osaka, 558-8585, Japan

    Hitomi Nakano, Tsugufumi Matsuyama & Kouichi Tsuji

Authors
  1. Hitomi Nakano
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  2. Shintaro Komatani
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  3. Tsugufumi Matsuyama
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  4. Kouichi Tsuji
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Correspondence to Hitomi Nakano.

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Nakano, H., Komatani, S., Matsuyama, T. et al. Improvement of Detection Limits for Particle Contamination by Confocal Configuration in X-Ray Fluorescence Microscope. ANAL. SCI. 37, 1447–1451 (2021). https://doi.org/10.2116/analsci.21P111

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  • DOI: https://doi.org/10.2116/analsci.21P111

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