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Correlation between the Relative Sensitivity Factors and the Sputtering Yields in Glow-Discharge Mass Spectrometry

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References

  1. W. W. Harrison, K. R. Hess, R. K. Marcus, and F. L. King, Anal. Chem., 1986, 58, 341A.

    Article  Google Scholar 

  2. N. E. Sanderson, E. Hall, J. Clark, P. Charalambous, and D. Hall, Mikrochim. Acta, 1987, 1, 275.

    Article  CAS  Google Scholar 

  3. W. Vieth and J. C. Huneke, Spectrochim. Acta, 1991, 46B, 137.

    Article  CAS  Google Scholar 

  4. A. P. Mykytiuk, P. Semeniuk, and S. Berman, Spectrochim. Acta Rev., 1990, 13, 1.

    CAS  Google Scholar 

  5. T. Saka, M. Inoue, and N. Okamoto, in Proceedings of the Fifth International Conference on Progress in Analytical Chemistry in the Steel and Metals Industries, ed. R. Tomellini, 1999, CETAS, Luxembourg, 579–586.

  6. P. M. Charalambous, Steel Res., 1987, 58, 197.

    Article  CAS  Google Scholar 

  7. K. Robinson and E. F. H. Hall, J. Metals, 1987, 39, 14.

    CAS  Google Scholar 

  8. N. Jakubowski and D. Stuewer, Fresenius Z. Anal. Chem., 1989, 335, 680.

    Article  CAS  Google Scholar 

  9. W. Vieth and J. C. Huneke, Spectrochim. Acta, 1991, 45B, 941.

    Google Scholar 

  10. S. Itoh, F. Hirose, and R. Hasegawa, Spectrochim. Acta, 1992, 47, 1241.

    Article  Google Scholar 

  11. M. Saito, Anal. Chim. Acta, 1993, 274, 327.

    Article  CAS  Google Scholar 

  12. M. Saito, Spectrochim. Acta, 1995, 50B, 171.

    Article  Google Scholar 

  13. M. Saito, Fresenius J. Anal. Chem., 1995, 351, 148.

    Article  CAS  Google Scholar 

  14. M. Saito, Fresenius J. Anal. Chem., 1997, 357, 18.

    Article  CAS  Google Scholar 

  15. K. Kanaya, K. Hojou, K. Adachi, and K. Toki, Micron, 1974, 5, 89.

    CAS  Google Scholar 

  16. N. Laegreid and G. K. Wehner, J. Appl. Phys., 1961, 32, 365.

    Article  CAS  Google Scholar 

  17. N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, and H. Tawara, Atomic Data and Nucl. Data Tables, 1984, 31, 1.

    Article  CAS  Google Scholar 

  18. W. D. Davis and T. A. Vanderslice, Phys. Rev., 1963, 131, 219.

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Applied Electronics, Daido Institute of Technology, 2-21 Daido-cho, Minami, Nagoya, 457-8531, Japan

    Takashi Saka

  2. Research and Development Lab., Daido Steel Co. Ltd., 2-30 Daido-cho, Minami, Nagoya, 457-8545, Japan

    Mika Inoue

Authors
  1. Takashi Saka
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  2. Mika Inoue
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Saka, T., Inoue, M. Correlation between the Relative Sensitivity Factors and the Sputtering Yields in Glow-Discharge Mass Spectrometry. ANAL. SCI. 16, 653–655 (2000). https://doi.org/10.2116/analsci.16.653

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  • DOI: https://doi.org/10.2116/analsci.16.653

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