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Charge-up Phenomena and Electron Flooding Effects on Monochromated X-Ray Photoelectron Spectroscopic Measurements of Alumina

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Abstract

An attempt was made to characterize the charge-up behavior and electron flooding effects at an a-alumina surface observed by monochromated X-ray photoelectron spectroscopy. The observed charge-up potential changed in a complicated manner with the X-ray irradiation time. The complicated features could be explained based on the balance between the electron loss from the surface caused by photoemission and electron gains by secondary electrons from the gold metal coating on the front of the input lens and by a creeping current from the ground level. The charge-up caused a retardation of the photoelectron emission rates, line-broadening of the spectra and slight changes in the differences among the binding energies of the spectral lines. The charge-up potential (ranging from 182 to 486 eV) was proportional to the X-ray irradiation flux at the surface. The relationship between the low-energy electron flux from an electron flood gun and the photoelectron energies was measured; thereby, the most suitable electron flux to compensate for the surface charge could be estimated.

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Authors and Affiliations

  1. ULVAC-PHI Incorporated, Hagisono, Chigasaki, 253, Japan

    Hitoshi Tomizuka

  2. Department of Applied Chemistry, Muroran Institute of Technology, Mizumoto, Muroran, 050, Japan

    Akimi Ayame

Authors
  1. Hitoshi Tomizuka
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  2. Akimi Ayame
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Tomizuka, H., Ayame, A. Charge-up Phenomena and Electron Flooding Effects on Monochromated X-Ray Photoelectron Spectroscopic Measurements of Alumina. ANAL. SCI. 10, 633–639 (1994). https://doi.org/10.2116/analsci.10.633

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  • DOI: https://doi.org/10.2116/analsci.10.633

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