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The online version of the original article can be found at http://dx.doi.org/10.1631/jzus.C1000219
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Lin, B., Yan, Xl., Shi, Z. et al. Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites. J. Zhejiang Univ. - Sci. C 12, 614 (2011). https://doi.org/10.1631/jzus.C10e0219
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DOI: https://doi.org/10.1631/jzus.C10e0219