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Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments

面向恶劣环境的基于AlN/4H-SiC 材料的声表面波谐振器设计与制作

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Abstract

Surface acoustic wave (SAW) sensors and micro-electromechanical system (MEMS) technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator (size: 1107 μm× 721 μm) based on the AlN/4H-SiC multilayer structure is designed and simulated. A MEMS-compatible fabrication process is employed to fabricate the resonator. The results show that highly c-axis-oriented AlN thin films deposited on the 4H-SiC substrate are obtained, with that the diffraction peak of AlN is 36.10° and the lowest full width at half maximum (FWHM) value is only 1.19°. The test results of the network analyzer are consistent with the simulation curve, which is very encouraging and indicates that our work is a significant attempt to solve the measurement problems mainly including high temperature stability of sensitive structures and the heat transmission of leads in harsh environments. It is essential to get the best performance of SAW resonator, optimize and characterize the behaviors in high temperatures in future research.

抽象

目 的

在高温等恶劣工作环境下, 燃气轮机有着迫切的温度等工况参数的实时监测需求。声表面波(SAW)技术与微机电系统(MEMS)技术的结合可提供一种很有发展前景的解决方案。本文旨在探讨SAW 谐振器的设计与仿真方法, 研究高质量c 轴择优取向的AlN 压电薄膜制备工艺及与MEMS 工艺兼容的SAW 谐振器制作工艺, 并测试其电学性能以验证SAW 谐振器设计与制作的正确性与可行性。

创新点

1. 首次在耐高温材料AlN/4H-SiC 上设计、仿真及制作SAW 谐振器并测试电学性能; 2. 在4HSiC上得到了高质量c 轴择优取向的AlN 压电薄膜并开发了一套与MEMS 工艺兼容的SAW 谐振器制作工艺。

方 法

1. 通过对SAW 谐振器所有结构参数的设计与仿真, 得到谐振器的谐振频率与反谐振频率等(图2 和3); 2. 利用磁控溅射方法在4H-SiC衬底上溅射高质量c 轴择优取向的AlN 压电薄膜, 再利用光刻、湿法腐蚀等MEMS 工艺制作SAW 谐振器(图4); 3. 通过扫描电镜和X 射线衍射等手段, 检测AlN 压电薄膜质量(图5和6)及器件制作结果(图7); 4. 利用网络分析仪测试SAW 谐振器电学性能并与仿真结果相比较, 验证SAW谐振器设计仿真方法和MEMS制作工艺的可行性和有效性(图8)。

结 论

1. 基于耐高温材料AlN/4H-SiC, 成功设计并制作出SAW谐振器(尺寸: 1107 μm×721 μm); 2. 在4H-SiC 上得到了高质量c 轴择优取向的AlN 压电薄膜, 衍射峰为36.10°, 摇摆曲线半高宽仅1.19°; 3. SAW 谐振器电学性能测试结果与仿真结果一致, 证明其设计仿真方法正确有效、MEMS 制作工艺可行。

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Authors and Affiliations

  1. Collaborative Innovation Center for Micro/Nano Fabrication, Device and System, State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, 100084, China

    Wei-zhong Wang, Yong Ruan & Zheng You

  2. State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin, 300072, China

    Ji Liang & Wei Pang

Authors
  1. Wei-zhong Wang
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  2. Ji Liang
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  3. Yong Ruan
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  4. Wei Pang
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  5. Zheng You
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Corresponding author

Correspondence to Zheng You.

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Project supported by the Tsinghua University Initiative Scientific Research Program (No. 20131089351), China

ORCID: Wei-zhong WANG, http://orcid.org/0000-0001-6909-0110

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Wang, Wz., Liang, J., Ruan, Y. et al. Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments. J. Zhejiang Univ. Sci. A 18, 67–74 (2017). https://doi.org/10.1631/jzus.A1600028

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  • DOI: https://doi.org/10.1631/jzus.A1600028

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