Abstract
Homogeneous, crack-free SrNbxTi1−x O3 thin films on (110) silicon substrates were successfully fabricated by sol-gel processing. The optimum route and conditions were systematically investigated. Sr(OAc)2 glacial acctic acid solution, after being refluxed and reacted with tartrate, formed Sr(OAc)2(C4H6O6)2; Ti(OBu)4 formed Ti(OAc)4−x (AcAc)x after having the ligand partially exchanged with AcAc, while Nb(OC2H5)5 formed (OAc)2Nb(AcAc) (C4H6O6) by exchanging of ligand in glacial acetic acid with (CH3CO)2O. All the metal species after undergoing partial hydrolysis and polymerization with hydroxyl or oxygen, formed SrNbxTi1−x O13 cluster sol. Methyl cellulose (MCL) caused SrNbxTi1−x O3 sol to have polymeric structure and easily form films. SrNbxTi1−x O3 films with perovskite were subsequently formed after being annealed at 650∼750 °C for 60 min in 25% N2+75% H2 (volume ratio) atmosphere. Resistivity of the SrNb0.1Ti0.9O3 films at room temperature was 64 μω·cm, a particular T 2 temperature dependence of the resistivity, from 25 K up to room temperature, was observed.
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Project (No. 2002CB613305) supported by the National Basic Research Program (973) of China
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Yin, Mz. Chemically processed Nb-doped SrTiO3 films and properties. J. Zhejiang Univ. - Sci. A 7, 1436–1439 (2006). https://doi.org/10.1631/jzus.2006.A1436
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DOI: https://doi.org/10.1631/jzus.2006.A1436