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Properties of AZO films grown by ALD applied as a TCO layer in perovskite solar cells

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Abstract

In recent years, aluminum-doped zinc oxide (AZO) has attracted much attention due to its high transmittance and low resistivity, which makes it an excellent candidate for various applications in photovoltaic field, photoelectric, and transparent electronic devices. However, producing an AZO film with a desirable electronic property is still a challenge. In this work, we demonstrate that AZO can be successfully deposited by the atomic layer deposition (ALD) technique. The results showed that it is possible to dope ZnO with aluminum through the ALD technique using multiple layers composed of ZnO and Al2O3. Films with transmittance above 80%, optical band gap between 3.3 and 3.8 eV and promising electronic properties were obtained for use as a transparent conductive layer in large-area perovskite solar cells.

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Acknowledgments

The authors gratefully acknowledge the support from BYD Energy Brazil through the PADIS/MCTI program, Project No. 5779/FUNCAMP, FAPESP (São Paulo Research Foundation, Processes 2017/11986-5), Shell, the strategic importance of the support given by ANP (Brazil’s National Oil, Natural Gas and Biofuels Agency) through the R&D levy regulation, the Brazilian research funding agencies INCT/INES/CNPq (Grant 465423/ 2014-0), the National Council of Technological and Scientific Development—CNPq (grant 302349/2021-9, 435260/2018-9 and 306297/2017-5), and the Coordination for the Improvement of Higher Education Personnel (CAPES). We would also like to thank the multi-user laboratory of the Gleb Wataghin Physics Institute (LAMULT).

Funding

BYD Energy Brazil PADIS/MCTI: Grant 5779/FUNCAMP; FAPESP: Grant 2017/11986-5; and INCT/INES/CNPq: Grant 465423/ 2014-0.

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Authors and Affiliations

  1. Gleb Wataghin Institute of Physics, University of Campinas, Campinas, São Paulo, 13083-970, Brazil

    Ana Paula de Melo Monteiro Modesto, Rafael B. Merlo, Diego G. Guzman & Francisco C. Marques

  2. School of Electrical and Computer Engineering, University of Campinas (Unicamp), Campinas, Brazil

    Tárcio A. S. Barros

  3. Centro de Tecnologia da Informação Renato Archer, Campinas, São Paulo, Brazil

    Thebano Emílio Almeida dos Santos

Authors
  1. Ana Paula de Melo Monteiro Modesto
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  2. Rafael B. Merlo
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  3. Diego G. Guzman
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  4. Tárcio A. S. Barros
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  5. Thebano Emílio Almeida dos Santos
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  6. Francisco C. Marques
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Contributions

Ana Paula de M. M. Modesto: investigation, data compilation and analysis, methodology, conceptualization, writing- review & editing. Rafael B. Merlo and Diego G. Guzman: data compilation and analysis. T. E. A. Santos, T. A. S. Barros and F.C. Marques: supervision, conceptualization, writing—review & editing, funding acquisition.

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Correspondence to Ana Paula de Melo Monteiro Modesto or Francisco C. Marques.

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de Melo Monteiro Modesto, A.P., Merlo, R.B., Guzman, D.G. et al. Properties of AZO films grown by ALD applied as a TCO layer in perovskite solar cells. MRS Advances (2024). https://doi.org/10.1557/s43580-024-00873-6

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