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Modulation of optical properties in epitaxial ZnO thin films on synthetic mica by incorporating Mg and bending stress

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Abstract

The optical properties of ZnO thin films were modulated using Mg alloying and applying bending stress. To modulate the optical properties using bending stress, synthetic mica was employed as a flexible substrate and the epitaxial growth was achieved by mist chemical vapor deposition (mist CVD). In addition, a ZnMgO alloy thin film was grown by mixing Mg precursors. Based on the previous studies on the relationship between Mg composition in the films and c-axis length, the Mg composition in the ZnMgO thin film was approximately 18%. Transmittance and photoluminescence (PL) spectra revealed that the optical properties of ZnO were also modulated by the Mg alloying. Moreover, the PL peak energies of the epitaxial ZnO and ZnMgO thin films were red shifted by approximately 15 meV due to the applied bending stress.

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References

  1. A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, S.F. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma, M. Kawasaki, Nat. Mater. 4, 42–46 (2005). https://doi.org/10.1038/nmat1284

    Article  CAS  Google Scholar 

  2. L. Gong, Z. Ye, J. Lu, L. Zhu, J. Huang, X. Gu, B. Zhao, Vacuum 84, 947–952 (2010). https://doi.org/10.1016/j.vacuum.2010.01.010

    Article  CAS  Google Scholar 

  3. F. Rahman, Opt. Eng. 58, 010901 (2019). https://doi.org/10.1117/1.OE.58.1.010901

    Article  CAS  Google Scholar 

  4. X. Liao, X. Yan, P. Lin, S. Lu, Y. Tian, Y. Zhang, ACS Appl. Mater. Interfaces 7, 1602–1607 (2015). https://doi.org/10.1021/am5070443

    Article  CAS  Google Scholar 

  5. F.C. Krebs, Org. Electron. 10, 761–768 (2009). https://doi.org/10.1016/j.orgel.2009.03.009

    Article  CAS  Google Scholar 

  6. X. Chen, G. Xu, G. Zeng, H. Gu, H. Chen, H. Xu, H. Yao, Y. Li, J. Hou, Y. Li, Adv. Mater. 32, 1908478 (2020). https://doi.org/10.1002/adma.201908478

    Article  CAS  Google Scholar 

  7. F. Alema, O. Ledyaev, R. Miller, V. Beletsky, A. Osinsky, W.V. Schoenfeld, J. Cryst. Growth 435, 6–11 (2016). https://doi.org/10.1016/j.jcrysgro.2015.11.012

    Article  CAS  Google Scholar 

  8. A. Ohtomo, M. Kawasaki, T. Koida, K. Masubuchi, H. Koinuma, Y. Sakurai, Y. Yoshida, T. Yasuda, Y. Segawa, Appl. Phys. Lett. 72, 2466–2468 (1998). https://doi.org/10.1063/1.121384

    Article  CAS  Google Scholar 

  9. K. Koike, K. Hama, I. Nakashima, G.-Y. Takada, K.-I. Ogata, S. Sasa, M. Inoue, M. Yano, J. Cryst. Growth 278, 288–292 (2005). https://doi.org/10.1016/j.jcrysgro.2005.01.021

    Article  CAS  Google Scholar 

  10. T.A. Wassner, B. Laumer, S. Maier, A. Laufer, B.K. Meyer, M. Stutzmann, M. Eickhoff, J. Appl. Phys. 105, 023505 (2009). https://doi.org/10.1063/1.3065535

    Article  CAS  Google Scholar 

  11. H. Nishinaka, Y. Kamada, N. Kameyama, S. Fujita, Phys. Status Solidi B 247, 1460–1463 (2010). https://doi.org/10.1002/pssb.200983247

    Article  CAS  Google Scholar 

  12. P. Rutthongjan, L. Liu, M. Nishi, M. Sakamoto, S. Sato, E.K.C. Pradeep, G.T. Dang, T. Kwaharamura, Jpn. J. Appl. Phys. 58, 035503 (2019). https://doi.org/10.7567/1347-4065/aafd18

    Article  CAS  Google Scholar 

  13. R. Ghosh, D. Basak, S. Fujihara, J. Appl. Phys. 96, 2689–2692 (2004). https://doi.org/10.1063/1.1769598

    Article  CAS  Google Scholar 

  14. A.B.M.A. Ashrafi, N.T. Binh, B.-P. Zhang, Y. Segawa, Appl. Phys. Lett. 84, 2814–2816 (2004). https://doi.org/10.1063/1.1705722

    Article  CAS  Google Scholar 

  15. T.P. Rao, M.C.S. Kumar, S.A. Angayarkanni, M. Ashok, J. Alloys Compd. 485, 413–417 (2009). https://doi.org/10.1016/j.jallcom.2009.05.116

    Article  CAS  Google Scholar 

  16. B. Wei, K. Zheng, Y. Ji, Y. Zhang, Z. Zhang, X. Han, Nano Lett. 12, 4595–4599 (2012). https://doi.org/10.1021/nl301897q

    Article  CAS  Google Scholar 

  17. R. Chen, Q.-L. Ye, T.C. He, T. Wu, H.D. Sun, Appl. Phys. Lett. 98, 241916 (2011). https://doi.org/10.1063/1.3601479

    Article  CAS  Google Scholar 

  18. F. Fang, D. Zhao, B. Li, Z. Zhang, D. Shen, X. Wang, J. Phys. Chem. C 114, 12477–12480 (2010). https://doi.org/10.1021/jp1037975

    Article  CAS  Google Scholar 

  19. A. Koma, Thin Solid Films 216, 72–76 (1992). https://doi.org/10.1016/0040-6090(92)90872-9

    Article  CAS  Google Scholar 

  20. C.-I. Li, J.-C. Lin, H.-J. Liu, M.-W. Chu, H.-W. Chen, C.-H. Ma, C.-Y. Tsai, H.-W. Huang, H.-J. Lin, H.-L. Liu, P.-W. Chiu, Y.-H. Chu, Chem. Mater. 28, 3914–3919 (2016). https://doi.org/10.1021/acs.chemmater.6b01180

    Article  CAS  Google Scholar 

  21. C.-H. Ma, J.-C. Lin, H.-J. Liu, T.H. Do, Y.-M. Zhu, T.D. Ha, Q. Zhan, J.-Y. Juang, Q. He, E. Arenholz, P.-W. Chiu, Y.-H. Chu, Appl. Phys. Lett. 108, 3104 (2016). https://doi.org/10.1063/1.4954172

    Article  CAS  Google Scholar 

  22. M. Yen, Y.-H. Lai, C.-L. Zhang, H.-Y. Cheng, Y.-T. Hsieh, J.-W. Chen, Y.-C. Chen, L. Chang, N.-T. Tsou, J.-Y. Li, Y.-H. Chu, ACS Appl. Mater. Interfaces 12, 21818–21826 (2020). https://doi.org/10.1021/acsami.0c02275

    Article  CAS  Google Scholar 

  23. B. Li, L. Ding, P. Gui, N. Liu, Y. Yue, Z. Chen, Z. Song, J. Wen, H. Lei, Z. Zhu, X. Wang, M. Su, L. Liao, Y. Gao, D. Zhang, G. Fang, Adv. Mater. Interfaces 6, 1901156 (2019). https://doi.org/10.1002/admi.201901156

    Article  CAS  Google Scholar 

  24. H.-G. Chen, Y.-H. Shih, H.-S. Wang, S.-R. Jian, T.-Y. Yang, S.-C. Chuang, Coatings 12, 706 (2022). https://doi.org/10.3390/coatings12050706

    Article  CAS  Google Scholar 

  25. S. Ke, J. Xie, C. Chen, P. Lin, X. Zeng, L. Shu, L. Fei, Y. Wang, M. Ye, D. Wang, Appl. Phys. Lett. 112, 031905 (2018). https://doi.org/10.1063/1.5010358

    Article  CAS  Google Scholar 

  26. Y. Arata, H. Nishinaka, K. Shimazoe, M. Yoshimoto, MRS Adv. 5, 1671–1679 (2020). https://doi.org/10.1557/adv.2020.85

    Article  CAS  Google Scholar 

  27. D. Tahara, H. Nishinaka, S. Morimoto, M. Yoshimoto, Appl. Phys. Lett. 112, 152102 (2018). https://doi.org/10.1063/1.5021296

    Article  CAS  Google Scholar 

  28. G.T. Dang, T. Kawaharamura, M. Furuta, M.W. Allen, IEEE Electron Device Lett. 36, 463–465 (2015). https://doi.org/10.1109/LED.2015.2412124

    Article  CAS  Google Scholar 

  29. Y. Ogura, Y. Arata, H. Nishinaka, M. Yoshimoto, Jpn. J. Appl. Phys. 61, SC1037 (2022). https://doi.org/10.35848/1347-4065/ac4688

    Article  Google Scholar 

  30. S.C. Abrahams, J.L. Bernstein, Acta Cryst. B25, 1233–1236 (1969). https://doi.org/10.1107/S0567740869003876

    Article  Google Scholar 

Download references

Acknowledgments

This study was supported by the JST SPRING (Grant Number JPMJSP2107).

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Authors and Affiliations

  1. Department of Electronics, Kyoto Institute of Technology, Matsugasaki, Kyoto, Sakyo-Ku, 606-8585, Japan

    Yuta Arata

  2. Faculty of Electrical Engineering and Electronics, Kyoto Institute of Technology, Matsugasaki, Kyoto, Sakyo-Ku, 606-8585, Japan

    Hiroyuki Nishinaka, Kazutaka Kanegae, Minoru Takeda & Masahiro Yoshimoto

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  1. Yuta Arata
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  2. Hiroyuki Nishinaka
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Correspondence to Yuta Arata.

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Arata, Y., Nishinaka, H., Kanegae, K. et al. Modulation of optical properties in epitaxial ZnO thin films on synthetic mica by incorporating Mg and bending stress. MRS Advances 8, 371–375 (2023). https://doi.org/10.1557/s43580-023-00534-0

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  • DOI: https://doi.org/10.1557/s43580-023-00534-0

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