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Modulating nanostructures in metals by magneton sputtering

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Abstract

Here, we report an effective nanostructures modulation strategy by W alloying and annealing treatment in Cu films deposited by magnetron sputtering. The as-deposited Cu and Cu–W films exhibit nanograins with comparable grain sizes. After annealing, nanograins in the Cu film are substantially coarsened accompanying with nano-twinned structure formation. While nanograins survive in annealed Cu–W films due to the pinning effect of W atoms on grain boundary migration. By increasing W content and/or annealing temperature, W particles segregation intensifies, and hybrid nanostructures are formed composed of nanoparticles and nanograins. Our findings can provide strategical guidance for fabricating high-performance nanostructured materials.

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Analyzed and raw data relevant to this study are available from the corresponding author upon reasonable requests.

References

  1. L. Sun, X. He, J. Lu, npj Comput Mater (2018). https://doi.org/10.1038/s41524-018-0062-2

    Article  Google Scholar 

  2. K. Kim, S. Park, T. Kim, Y. Park, G.D. Sim, D. Lee, J. Alloys Compd. (2022). https://doi.org/10.1016/j.jallcom.2022.165808

    Article  Google Scholar 

  3. T.E.J. Edwards, N. Rohbeck, E. Huszár, K. Thomas, B. Putz, M.N. Polyakov, X. Maeder, L. Pethö, J. Michler, Adv. Sci. (2022). https://doi.org/10.1002/advs.202203544

    Article  Google Scholar 

  4. S. Li, Q. Zhu, B. Zheng, J. Yuan, X. Wang, Mater. Sci. Eng. A (2019). https://doi.org/10.1016/j.msea.2019.04.107

    Article  Google Scholar 

  5. L. Han, J. Wang, Y. Chen, Y. Huang, Y. Liu, Z. Wang, Mater. Sci. Eng. A (2021). https://doi.org/10.1016/j.msea.2021.141274

    Article  Google Scholar 

  6. L. Zeng, L. Zeng, S. Miao, X. Zhang, W. Liu, Mater. Sci. Eng. A (2022). https://doi.org/10.1016/j.msea.2022.144228

    Article  Google Scholar 

  7. Z. Cheng, H. Zhou, Q. Lu, H. Gao, L. Lu, Science (2018). https://doi.org/10.1126/science.aau1925

    Article  Google Scholar 

  8. D.K.Q. Mu, Z. Zhang, Y.H. Xie, J.M. Liang, J. Wang, D.L. Zhang, Mater. Charact. (2021). https://doi.org/10.1016/j.matchar.2021.111090

    Article  Google Scholar 

  9. G. Li, W. Lü, S. Liu, C. Li, Y. Zhou, Q. Wang, Compos. B Eng. (2021). https://doi.org/10.1016/j.compositesb.2021.108620

    Article  Google Scholar 

  10. H. Ahmoum, G. Li, S. Belakry, M. Boughrara, M.S. Su’ait, M. Kerouad, Q. Wang, Mater. Sci. Semicond. Process. (2021). https://doi.org/10.1016/j.mssp.2020.105530

    Article  Google Scholar 

  11. M.T. Le, Y.U. Sohn, J.W. Lim, G.S. Choi, Mater. Trans. (2010). https://doi.org/10.2320/matertrans.M2009183

    Article  Google Scholar 

  12. H. Garbacz, P. Wiecinski, B. Adamczyk-Cieslak, J. Mizera, K.J. Kurzydlowski, J. Microsc. (2010). https://doi.org/10.1111/j.1365-2818.2009.03297.x

    Article  Google Scholar 

  13. Q. Li, J. Wang, H. Wang, X. Zhang, J. Mater. Res. (2021). https://doi.org/10.1557/s43578-021-00363-7

    Article  Google Scholar 

  14. A.I. Akira Takeuchi, Mater. Trans. (2005). https://doi.org/10.2320/matertrans.46.2817

    Article  Google Scholar 

  15. G.M. Valentino, P.P. Shetty, A. Chauhan, J.A. Krogstad, T.P. Weihs, K.J. Hemker, Scr. Mater. (2020). https://doi.org/10.1016/j.scriptamat.2020.05.031

    Article  Google Scholar 

  16. T. Xie, J. Zhu, L. Fu, R. Zhang, N. Li, M. Yang, J. Wang, W. Qin, W. Yang, D. Li, L. Zhou, Mater. Sci. Eng. A (2018). https://doi.org/10.1016/j.msea.2018.05.035

    Article  Google Scholar 

  17. Y. Du, L. Li, J.M. Pureza, Y.W. Chung, K.G. Pradeep, S. Sen, J. Schneider. Surf. Coat. Technol. (2019). https://doi.org/10.1016/j.surfcoat.2018.10.069

    Article  Google Scholar 

  18. P. Mao, J. Cui, Y. Chen, J. Qiu, Q. Jin, J. Qiao, Y. Zhao, K. Cui, N. Gao, K. Tai, J. Nucl. Mater. (2019). https://doi.org/10.1016/j.jnucmat.2019.151741

    Article  Google Scholar 

  19. H.A. Murdoch, C.A. Schuh, Acta Mater. (2013). https://doi.org/10.1016/j.actamat.2012.12.033

    Article  Google Scholar 

  20. R.K. Rajgarhia, A. Saxena, D.E. Spearot, K.T. Hartwig, K.L. More, E.A. Kenik, H. Meyer, J. Mater. Sci. (2010). https://doi.org/10.1007/s10853-010-4764-1

    Article  Google Scholar 

  21. J. Hu, Y.N. Shi, X. Sauvage, G. Sha, K. Lu, Science (2017). https://doi.org/10.1126/science.aal5166

    Article  Google Scholar 

  22. J. da Costa Teixeira, L. Bourgeois, C.W. Sinclair, C.R. Hutchinson, Acta Mater. (2009). https://doi.org/10.1016/j.actamat.2009.08.034

    Article  Google Scholar 

  23. B. Bellón, S. Haouala, J. Llorca, Acta Mater. (2020). https://doi.org/10.1016/j.actamat.2020.05.040

    Article  Google Scholar 

  24. C. Fan, Q. Li, J. Ding, Y. Liang, Z. Shang, J. Li, R. Su, J. Cho, D. Chen, Y. Wang, J. Wang, H. Wang, X. Zhang, Acta Mater. (2019). https://doi.org/10.1016/j.actamat.2019.07.003

    Article  Google Scholar 

  25. B. Ma, X. Qi, R. Li, R. Zhang, H. Shang, J. Alloys Compd. (2021). https://doi.org/10.1016/j.jallcom.2020.157707

    Article  Google Scholar 

  26. D. Field, L. Bradford, M. Nowell, T. Lillo, Acta Mater. (2007). https://doi.org/10.1016/j.actamat.2007.03.021

    Article  Google Scholar 

  27. X. Zhong, L. Huang, F. Liu, J. Mater. Eng. Perform. (2020). https://doi.org/10.1007/s11665-020-05093-1

    Article  Google Scholar 

  28. J.T. Zhao, J.Y. Zhang, Z.Q. Hou, K. Wu, X.B. Feng, G. Liu, J. Sun, Nanotechnology (2018). https://doi.org/10.1088/1361-6528/aab19a

    Article  Google Scholar 

  29. I. Souli, G.C. Gruber, V.L. Terziyska, J. Zechner, C. Mitterer, J. Alloys Compd. (2019). https://doi.org/10.1016/j.jallcom.2018.12.250

    Article  Google Scholar 

  30. P. Ma, C. Liu, Q. Chen, Q. Wang, L. Zhan, J. Li, J. Mater. Sci. Technol. (2020). https://doi.org/10.1016/j.jmst.2019.11.035

    Article  Google Scholar 

Download references

Acknowledgments

The authors acknowledge financial support from the Ministry of Science and Technology of China (Grants 2017YFA0700702, 2017YFA0700705), the National Natural Science Foundation of China (Grants 52073290, 51927803), Science Fund for Distinguished Young Scholars of Liaoning Province (Grant 2023JH6/100500004), the Postdoctoral Scientific Research Foundation of Shenyang Ligong University, and the Doctoral Research Foundation Project of Liaoning Science and Technology Department (Grant 2022-BS-184).

Funding

This study is supported by the Ministry of Science and Technology of China (Grants 2017YFA0700702, 2017YFA0700705), the National Natural Science Foundation of China (Grants 52073290, 51927803), Science Fund for Distinguished Young Scholars of Liaoning Province (Grant 2023JH6/100500004), the Postdoctoral Scientific Research Foundation of Shenyang Ligong University, and the Doctoral Research Foundation Project of Liaoning Science and Technology Department (Grant 2022-BS-184).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Shenyang Ligong University, Shenyang, 110159, Liaoning, China

    Pengyan Mao & Hui Zhao

  2. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China

    Zhao Cheng, Zhi Yu & Kaiping Tai

  3. School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, China

    Zhi Yu & Kaiping Tai

  4. School of Equipment Engineering, Shenyang Ligong University, Shenyang, 110159, Liaoning, China

    Hongda Li

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  1. Pengyan Mao
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Correspondence to Kaiping Tai.

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Mao, P., Cheng, Z., Yu, Z. et al. Modulating nanostructures in metals by magneton sputtering. MRS Communications 13, 492–499 (2023). https://doi.org/10.1557/s43579-023-00366-x

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