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Review of materials science and technological applications of transformational integrated multifunctional oxide/ultrananocrystalline diamond (UNCD) films/crystalline diamond for new generation of high-tech and biomedical devices

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Abstract

R&D on materials science/integration of multifunctional oxide and polycrystalline diamond films and crystalline diamond are being performed to enable new generations of multifunctional high-tech and biomedical devices for transformational impact on the way/quality of life of people. Key multifunctional oxide films investigated include:

  • Nanolaminate structured TiOx/Al2O3 and HfO2/TiOx films exhibiting super-high dielectric constants (k = 400–1100), enabling new generation gate oxides for nano-electronics and supercapacitors for energy storage, specifically, integrated with crystalline diamond, may enable transformational diamond micro/nano-electronics beyond silicon.

  • Films with ferroelectric/piezoelectric properties [e.g., Pb (ZrxTi1-x) O3 (PZT) and BiFeO3 (BFO), the latter being biocompatible], integrated with polycrystalline diamond films, enabling new generations of piezo-actuated MEMS/NEMS’ biosensors and energy generation devices.

  • Key multifunctional diamond in film and crystalline form include:

  • Crystalline diamond, exhibiting superior electronic carrier mobility and thermal transport, enabling transformational new generation of micro/nano-electronics based on unique integration with super high-k dielectric nanolaminates oxides.

  • Unique transformational ultrananocrystalline diamond (UNCD) film (3–5 nm grains/smallest of any poly-diamond film), with unique combination of highest hardness (98 GPa) and Young’s modulus (998 GPa), equivalent to diamond gem, lowest coefficient of friction (0.02–0.04) of any diamond film, only electrically conductive diamond film via Nitrogen (N) atoms in grain boundaries or Boron atoms substituting C atoms in the diamond lattice, yielding electrons for conductivity, and best biocompatible coating demonstrated today, integrated with piezoelectric oxide films, enable new generation of piezo-actuated MEMS/NEMS’ biosensors and energy generation devices.

This review describes the materials science and technological applications developed in recent years for transformational integration of key multifunctional oxides / UNCD films / crystalline diamond.

Graphical abstract

The graphical abstrat shows key science and technolgies related to trnaformational integration of super-high-k dielectric films with crystalline diamond and piezoelectric films with UNCD films for new generation MEMS/NEMS devices.

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Acknowledgments

O. Auciello acknowledge different sources which supported and colleagues who made major contributions to the science and technological reviewed in this article, Funding for R&D on multifunctional oxides and UNCD film technologies, during the last twenty years, include: Distinguished Endowed Chair Professor Grant from University of Texas-Dallas (2012-present); SENACYT-Panamá, Department of Energy-Basic Energy Sciences Grants, DARPA Grants, ONR Grants, National Science Foundation Grants, and Industrial funding (Rubio-Pharma-México, UHV-Nanoranch, Samsung, INTEL, Lam, Lockheed-Martin). Auciello acknowledges the contributions of the four main scientists that jointly with him performed the R&D to develop the UNCD coating technology using the MPCVD method (D.M. Gruen, A.R. Krauss, J.A. Carlisle, A.V. Sumant), and the R&D related to the HFCVD technique (J.-F. Veyan, E. de Obaldia, J. J. Alcantar-Peña, E. M. A. Fuentes-Fernandez, K. Kang, P. Tirado, A. G. Montaño-Figueroa). He also acknowledges key contributors to the science on multifunctional oxides and integration with UNCD (C. Lee, Y. Chen, I. Mejia, R.S. Katiyar, M.J. Bedzyk). Auciello also acknowledges A. Gruverman with whom the PFM technique was developed to image piezoelectric domains. O. Auciello acknowledges support from different sources, which supported the science and technological applications of the UNCD coatings, during the last twenty years, namely: Distinguished Endowed Chair Professor Gran from University of Texas-Dallas; SENACYT-Panamá, Department of Energy-Basic Energy Sciences Grants, DARPA Grants, ONR Grants, National Science Foundation Grants, and Industrial funding (Rubio-Pharma-México, UHV-Nanoranch, Samsung, INTEL, Lam, Lockheed-Martin).

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    Orlando Auciello

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Auciello, O. Review of materials science and technological applications of transformational integrated multifunctional oxide/ultrananocrystalline diamond (UNCD) films/crystalline diamond for new generation of high-tech and biomedical devices. Journal of Materials Research 38, 571–585 (2023). https://doi.org/10.1557/s43578-023-00897-y

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