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Additive manufacturing and characterization of microstructures using two-photon polymerization for use in cryogenic applications

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Abstract

Fabricating polymer structures for use at cryogenic temperatures is a non-trivial task due to coefficient of thermal expansion mismatches and stresses that are induced because of this mismatch. This work demonstrates a viable process to additively fabricate polymer microstructures using two-photon polymerization (TPP) on silicon substrates with tetraethylorthosilicate oxide for use at cryogenic temperatures. The process of creating the polymerized structures using resins SR368 and SR499, as well as its application onto the target substrate is detailed. The importance of pre-fabrication adhesion layer processing is discussed and post-polymerization procedures are described. Cryogenic thermal cycling was performed by direct submersion into liquid nitrogen to assess worst-case degradation due to thermal shock and exhibited encouraging shear load failure performance after thermal cycling. The reliability of the test structures demonstrated in this work shows promise for implementing more complex structures using TPP for use at cryogenic temperatures.

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Acknowledgments

We thank the Alabama Micro/Nano Science and Technology Center (AMNSTC) for providing access to fabrication and characterization facilities used in this work. We also thank Systems Visions, LLC. and Office of Naval Research (ONR) for funding the foundational research that enabled this work. We would like to thank Tommaso Baldacchini and Brent Bottenfield for technical guidance.

Funding

This material is based upon work supported by the Office of Naval Research under Contract No. N68335-20-C-0441.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Auburn University, Auburn, AL, USA

    Sherman E. Peek, Jacob Ward, Stephen Bankson, Archit Shah, John A. Sellers, Mark L. Adams & Michael C. Hamilton

  2. Alabama Micro/Nano Science and Technology Center (AMNSTC), Auburn University, Auburn, AL, USA

    Sherman E. Peek, Jacob Ward, Stephen Bankson, Archit Shah, John A. Sellers, Mark L. Adams & Michael C. Hamilton

  3. Systems Visions LLC, Auburn, AL, USA

    Sherman E. Peek & Mark L. Adams

Authors
  1. Sherman E. Peek
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  2. Jacob Ward
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  3. Stephen Bankson
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  4. Archit Shah
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  5. John A. Sellers
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  7. Michael C. Hamilton
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Contributions

SP and JW performed fabrication, testing, and analysis of TPP structures. SB performed SEM operation. AS performed initial shear testing. JS, MA, and MH provided technical guidance.

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Correspondence to Sherman E. Peek.

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Peek, S.E., Ward, J., Bankson, S. et al. Additive manufacturing and characterization of microstructures using two-photon polymerization for use in cryogenic applications. Journal of Materials Research 37, 1978–1985 (2022). https://doi.org/10.1557/s43578-022-00610-5

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  • DOI: https://doi.org/10.1557/s43578-022-00610-5

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