Abstract
ZnO thin films were deposited using the DC pulsed magnetron sputtering technique to study how composition and structure influences their magnetic properties. Low sputtering powers and high substrate temperatures were used to increase adatom mobility during deposition, resulting in increased crystallite size and reduced residual stress in the films. Another set of ZnO films were Mn-doped using a second magnetron gun and the amount of doping was changed by controlling the RF sputtering power. For these films, the crystallite size increased with the amount of Mn. The magnetic properties of these materials were counterintuitive; not intentionally doped ZnO showed the highest magnetization and magnetization decreased with increasing Mn concentration.
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References
Woo-Sun Lee, Gwon-Woo Choi, Yong-Jin Seo, Microelectronics Journal, 40, 299 (2009).
Ahmad Echresh, Chan Oeurn Chey, Morteza Zargar Shoushtari, Volodymyr Khranovskyy, Omer Nur, Magnus Willander, Journal of Alloys and Compounds, 632, 165 (2015).
Wei-Jie Huang, Scott A. De Valle, Jean B. Kana Kana, K. Simmons-Potter, B.G. Potter Jr,Solar Energy Materials and Solar Cells, 137, 86 (2015) June 2015.
Rafik Serhane, Samira Abdelli-Messaci, Slimane Lafane, Hammouche Khales, Walid Aouimeur, Abdelkadder Hassein-Bey, Tarek Boutkedjirt, Applied Surface Science, 288, 572, (2014).
J.F. Chang, H.H. Kuo, I.C. Leu, M.H. Hon, Sensors and Actuators B: Chemical, 84, 258 (2002).
D. Seghier, H.P. Gislasson, J. Mater Sci: Mater Electron, 22, 1400 (2011).
Yongquiang Wang, Yunxing Song, Shiyan Yin, Gingqi Yu, Juhong Miao, SongLiu Yuan, Materials Science and Engineering B, 131, 9 (2006)
Jing Qi, Yinghu Yang, Li Zhang, Junhong Chi, Daqiang Gao, Desheng Xue, Scripta Materialia, 60, 289 (2009).
Siddhartha Mal, Tsung-Han Yang, Chunming Jin, Sudhakar Nori, J. Narayan, J.T. Prater, Scripta Materialia, 65, 1061 (2011).
Marzieh Shirazi, M.T. Hosseinnejad, Akbar Zendehnam, Mahmood Ghoranneviss, G. Reza Etaati, Journal of Alloys and Compounds 602, 108 (2014).
Shashikant Sharma, Sumit Vyas, C. Periasamy, P. Chakrabarti, Superlattices and Microstructures 75, 378 (2014).
A.I. Ali, A.H. Ammar, A. Abdel Moez, Superlattices and Microstructures, 65, 285 (2014).
M. Bououdina, K. Omri, M. El-Hilo, A. El Amiri, O.M. Lemine, A. Alyamani, E.K. Hlil, H. Lassri, L. El Mir, Physica E 56, 107 (2014).
Mariana Stefan, Sergiu V. Nistor, Daniela Ghica, Crystal Growth and Design 13, 1350 (2013)
Dan Hu, Xu Liu, Shaojuan Deng, Yongjun Liu, Zhipeng Feng, Bingqian Han, Yan Wang,Yude Wang, Physica E: Low-dimensional Systems and Nanostructures, 61, 14 (2014).
H.B. Ruan, L. Fang, D.C. Li, M. Saleem, G.P. Qin, C.Y. Kong, Thin Solid Films, 519, 5078 (2011).
Arun Aravind, M.K. Jayaraj, Mukesh Kumar, Ramesh Chandra, Materials Science and Engineering: B, 177, 1017 (2012).
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Camacho-Berrios, A., Pantojas, V. & Otaño, W. Influence of growth conditions on the physical properties of Mn doped ZnO thin films grown by reactive magnetron sputtering. MRS Online Proceedings Library 1805, 721 (2015). https://doi.org/10.1557/opl.2015.685
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DOI: https://doi.org/10.1557/opl.2015.685