This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.
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The authors wish to thank Dr Mark Rosamond and Mr Leon Bowen for their assistance preparing samples using the FIB, Dr Budhika Mendis for the TEM images and finally Dr Richard Thompson for the RBS analysis.
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Dodd, L.E., Gallant, A.J. & Wood, D. Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique. MRS Online Proceedings Library 1415, 91–96 (2012). https://doi.org/10.1557/opl.2012.72