Abstract
In this contribution, we report on a numerical study demonstrating how to realize Electrostatic Force Microscopy (EFM) tomography. Based on the Equivalent Charge Method, both force and force gradient between a buried object (or trapped charges) and the Atomic Force Microscope tip are calculated. The main idea is to scan the sample at different tip sample distances and obtain the position and charge value of the object using reconstruction algorithms. The quantitative analysis here presented is a first step toward tomography for samples presenting “dilute” point charges creating non correlated signals by the interpretation of EFM signals. Lateral resolution, sensitivity (i.e. ability to detect an object), performance and limitations of EFM are also discussed in the paper.
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References
C. Schonenberger and S. F. Alvarado, Physical Review Letters 65, 3162 (1990)
C. Riedel, R. Arinero, T. Ph, M. Ramonda, G. Leveque, G. A. Schwartz, D. G. d. Oteyza, A. Alegria, and J. Colmenero, Journal of Applied Physics 106, 024315 (2009)
C. Riedel, R. Sweeney, N. E. Israeloff, R. Arinero, G. A. Schwartz, A. Alegria, P. Tordjeman and J. Colmenero, Applied Physics Letters, 96, 213110 (2010)
C. Riedel, A. Alegría, G. A. Schwartz, R. Arinero, J. Colmenero, J. J. Sáenz, Applied Physics Letters, 99, 023101 (2011)
L. Portes, P. Girard, R. Arinero, M. Ramonda, Review of Scientific Instruments, 77, 096101 (2006)
S. Belaïdi, F. Lebon, P. Girard, G. Leveque and S. Pagano, Applied Physics A: Materials Science and Processing 66(0) p. S239–S243 (1998)
S. Belaïdi, P. Girard, G. Leveque, J. Appl. Phys., 81(3), 1023–1030 (1997)
G. M. Sacha, E. Sahagun, and J.J. Saenz, Journal of Applied Physics, 101(2), p. 024310 (2007).
E. Durand, Electrostatique, tome III, Masson, Paris, p.233 (1966).
J. Sun, J. C. Schotland, R. Hillenbrand, and P. S. Carney, Applied Physics Letters 95, 121108 (2009).
G. Gramse, J. Casuso, J. Toset, L. Fumagalli, and G. Gomila, Nanotechnology 20, 395702 (2009)
C. Riedel, R. Arinero, P. Tordjeman, G. Lévêque, G. A. Schwartz, A. Alegria and J. Colmenero, Phys. Rev. E, 81 010801(2010)
M. Zhao, X. Gu, S. E. Lowther, C. Park C, Y. C. Jean and T. Nguyen, Nanotechnology, 21 225702 (2010)
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Riedel, C., Arinero, R., Alegria, A. et al. Three-dimensional tomography of single charge inside dielectric materials using electrostatic force microscopy. MRS Online Proceedings Library 1421, 1–6 (2012). https://doi.org/10.1557/opl.2012.53
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DOI: https://doi.org/10.1557/opl.2012.53