Skip to main content
SpringerLink
Log in

Sharp Silicon Nano-Needles Based on Boron Etch-Stop in TMAH Solutions

  • Materials And Sensors For Biomedical Applications
  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Operations on biological living cells and molecular devices have driven research towards implementation of high-aspect-ratio nano-needles. However, current nano-needle fabrication is complicated to control the sizes and angles. In this work, we develop a simple method to fabricate repeatable and integrated circuit (IC)-compatible sharp silicon nano-needles based on boron etch-stop in tetramethyl ammonium hydroxide (TMAH) solutions, and the needle angles can be accurately controlled. An analytical model is proposed to efficiently predict the needle sizes and explain the etching evolution of silicon nano-needles.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. I. Obataya, C. Nakamura, S. Han, N. Nakamura, and J. Miyake, Nano Lett. 5, 27 (2005).

    Article  CAS  Google Scholar 

  2. K. Yum, N. Wang, and M. F. Yu, Nanoscale 2, 363 (2009).

    Article  Google Scholar 

  3. S. W. Han, C. Nakamura, I. Obataya, N. Nakamura, and J. Miyake, Biosensors & Bioelectronics 20, 2120 (2005).

    Article  CAS  Google Scholar 

  4. M. Jouzi, M. B. Kerby, A. Tripathi, and J. Xu, Langmuir 24, 10786 (2008).

    Article  CAS  Google Scholar 

  5. S. W. Han, C. Nakamura, N. Kotobuki, I. Obataya, H. Ohgushi, T. Nagamune, and J. Miyake, Nanomedicine: NBM 4, 215(2008).

    Article  CAS  Google Scholar 

  6. A. Goryu, A. Ikedo, M. Ishida, and T. Kawano, Nanotechnology 21, 125302(2010).

    Article  Google Scholar 

  7. C. H. Hsu, H. C. Lo, C. F. Chen, C. T. Wu, J. S. Hwang, D. Das, J. Tsai, L. C. Chen, and K. H. Chen, Nano Lett. 4, 471(2004).

    Article  CAS  Google Scholar 

  8. P. M. Rao and X. L. Zheng, Nano Lett. 9, 3001(2009).

    Article  CAS  Google Scholar 

  9. O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, Sens. Actuators A 34, 51(1992).

    Article  CAS  Google Scholar 

  10. K. Sato, M. Shikida, T. Yamashiro, K. Asaumi, Y. Iriye, and M. Yamamoto, Sens. Actuators A 73, 131(1999).

    Article  CAS  Google Scholar 

  11. E. Steinsland, M. Nese, A. Hanneborg, R. W. Bernstein, H. Sandmo, and G. Kittilsland, Sens. Actuators A 54, 728(1996).

    Article  CAS  Google Scholar 

  12. S. Tatic-Lucic, W. Y. Zhang, and N. Navneet, Sens. Actuators A 123–24, 640(2005).

    Article  Google Scholar 

  13. M. C. Acero, J. Esteve, C. Burrer, and A. Gotz, Sens. Actuators A 46, 22(1995).

    Article  CAS  Google Scholar 

  14. Rikard A. Wind, Melissa A. Hines, Surface Science 460, 21(2000).

    Article  CAS  Google Scholar 

  15. E. van Veenendaal, K. Sato, M. Shikida, A. J. Nijdam, and J. van Suchtelen, Sens. Actuators A 93, 232(2001).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China

    Sheping Yan, Yang Xu, Junyi Yang, Huiquan Wang, Zhonghe Jin & Yuelin Wang

Authors
  1. Sheping Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yang Xu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Junyi Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Huiquan Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Zhonghe Jin
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Yuelin Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yan, S., Xu, Y., Yang, J. et al. Sharp Silicon Nano-Needles Based on Boron Etch-Stop in TMAH Solutions. MRS Online Proceedings Library 1301, 225–228 (2011). https://doi.org/10.1557/opl.2011.71

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/opl.2011.71

Search

Navigation