Abstract
Porous silicon waveguides with integrated porous silicon grating couplers are demonstrated as small molecule biosensors. Two fabrication methods are presented for the grating couplers: standard electron beam lithography with reactive ion etching and a new technique based on direct imprinting of porous substrates. Although the gratings fabricated using standard lithographic techniques have steeper sidewalls and enable a larger available sensing surface area inside the waveguide, the imprinted gratings have the advantage of rapid and low-cost fabrication. Both the lithographically and imprinted sensors are shown to have waveguide losses on the order of 10 dB/cm, and both are demonstrated for detection of 16mer nucleic acids.
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Wei, X., Weiss, S.M. Grating Coupled Waveguide Biosensor Based on Porous Silicon. MRS Online Proceedings Library 1301, 219–224 (2011). https://doi.org/10.1557/opl.2011.553
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DOI: https://doi.org/10.1557/opl.2011.553