Abstract
Ion irradiation with 130 keV Ge+ or 120 keV Sb+ has modified, by thermal spike effect, the local atomic arrangement in the structure of as-deposited sputtered amorphous GeTe and Ge2Sb2Te5 thin films. The changes in the local order have been analyzed by Raman and EXAFS spectroscopy. In addition the crystallization kinetic, measured by “in situ” time resolved reflectivity and optical microscope analysis, is found to be faster in the irradiated samples. The nucleation rate and the grain growth velocity are enhanced by a factor of about ten with respect to the unirradiated samples in the investigated temperature range ( 120°C -170°C).
Similar content being viewed by others
References
M. Wuttig, N. Yamada, Nat. Mater. 6 (2007) 824–832.
S. Lai, IEDM Technical Digest, 2003, pp. 10.1.1–10.1.4.
A.V.Kolobov, P. Fons, J. Tominaga, A. L. Ankudinov, S. N. Yannopolous, K. S. Andrikopolous, J. Phys. Condens. Matter 16 (2004) 55103.
R. Mazzarella, S. Caravati, S. Angioletti-Uberti, M. Bernasconi, M. Parrinello, Phys. Rev. Lett. 104 (2010) 085503.
J. Akola, F03 EPCOS, available on: http://iffwww.iff.kfa-juelich.de/jones/EPCO-Salj 10.pdf, (2010).
E. Carria, A. M. Mio, S. Gibilisco, M. Miritello, M. G. Grimaldi and E. Rimini, Electrochemical and Solid-State Letters, 14 (2011) H124–H127.
A. M. Mio, E. Carria, G. D’Arrigo, S. Gibilisco, M. Miritello, M. G. Grimaldi, E. Rimini, J. Non-Cryst.Solids (2011).
E. Rimini, R. De Bastiani,, E. Carria, M. G. Grimaldi, G. Nicotra, C. Bongiorno, and C. Spinella, J. Appl. Phys. 105, 123502, (2009).
K. S. Andrikopoulos, S. N. Yannopolous, A. V. Lolobov, P. Fons, and J. Tominaga, J. Phys. Chem. Solids 68, 1074 (2007).
A. Kolobov, P. Fons, A. I. Frenkel, A. L. Ankundinov, J. Tominaga, and T. Uruga, Nature Mater. 3, 703 (2004)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Rimini, E., Carria, E., Mio, A.M. et al. Ion Irradiation on Phase Change Materials. MRS Online Proceedings Library 1354, 606 (2011). https://doi.org/10.1557/opl.2011.1211
Published:
DOI: https://doi.org/10.1557/opl.2011.1211