Article PDF
Use our pre-submission checklist
Avoid common mistakes on your manuscript.
Rights and permissions
About this article
Cite this article
Carvajal, J.J. Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits. MRS Bulletin 34, 397 (2009). https://doi.org/10.1557/mrs2009.110
Published:
Issue Date:
DOI: https://doi.org/10.1557/mrs2009.110