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Focused Ion Beam Micro- and Nanoengineering

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Abstract

This article discusses applications of focused ion beam micro- and nanofabrication. Emphasis is placed on illustrating the versatility of focused ion beam and dual-platform systems and how they complement conventional processing techniques. The article is divided into four parts: maskless milling, ion beam lithography, ion implantation, and techniques such as in situ micromanipulation.

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References

  1. M.T. Abramo, L.L. Hahn, Microelectron. Reliability 11, 1775 (1996).

    Article  Google Scholar 

  2. G. Pan et al., J. Magn. Magn. Mater. 202, 583 (1999).

    Article  CAS  Google Scholar 

  3. F. Lacour et al., Opt. Lett. 27 (8), 1421 (2005).

    CAS  Google Scholar 

  4. L. Kumarir, S.V. Subramanyam, Bull. Mater. Sci. 27 (3), 289 (2004).

    Article  Google Scholar 

  5. S.N. Sharma, S.M. Shivaprasad, S. Kohli, R. Rastogi, Pure Appl. Chem. 74 (9), 1739 (2002).

    Article  CAS  Google Scholar 

  6. F. Schiappelli et al., Microelectron. Eng. 73, 397 (2004).

    Article  Google Scholar 

  7. C.W. Leung, C. Bell, G. Burnel, M.G. Blamire, Phys. Rev. B 72, 212409 (2005).

    Article  CAS  Google Scholar 

  8. H. Lohmeyer et al., J. Eur. Phys. B 48, 291 (2005).

    Article  CAS  Google Scholar 

  9. S.-J. Kim et al., Physica C 412, 1401 (2004).

    Article  CAS  Google Scholar 

  10. D.A. Allwood et al., Science 296, 2003 (2002).

    Article  CAS  Google Scholar 

  11. A. Yu Toporov, R.M. Langford, A.K. Petford-Long, Appl. Phys. Lett. 77, 3065 (2000).

    Article  Google Scholar 

  12. C. Enkrich et al., Adv. Mater. 17, 2547 (2005).

    Article  CAS  Google Scholar 

  13. A. Lugstein et al., Appl. Phys. Lett. 81 (2), 349 (2002).

    Article  CAS  Google Scholar 

  14. K.H. An et al., Appl. Phys. Lett. 89, 111117 (2006).

    Article  CAS  Google Scholar 

  15. H. Ximen, P.E. Russell, Ultramicroscopy 42, 1526 (1996).

    Google Scholar 

  16. Z. Liu, Y. Dan, Q. Jinjun, Y. Wu, J. Appl. Phys. 91 (10), 918843 (2002).

    Google Scholar 

  17. L. Gao et al., IEEE Trans. Magn. 40 (4), 2194 (2004).

    Article  CAS  Google Scholar 

  18. P.N. Nellen, V. Callegari, U. Sennhauser, Chimia 60 (11), 735 (2006).

    Article  CAS  Google Scholar 

  19. S. Reyntjens, R. Puers, J. Micromech. Microeng. 10, 181 (2000).

    Article  CAS  Google Scholar 

  20. C. Motz, T. Schoberl, R. Pippan, Acta Mater. 53, (2005) p. 4269.

    Article  CAS  Google Scholar 

  21. J. McCarthy, Z. Pei, M. Becker, D. Atteridge, Thin Solid Films 358, 146 (2000).

    Article  CAS  Google Scholar 

  22. M.D. Uchic, D.M. Dimiduk, W.D. Nix, Science 305, 986 (2004).

    Article  CAS  Google Scholar 

  23. P. Trtik, CM. Reeves, P.J.M. Bartos, Mater. Struct. 33, 189 (2000).

    Article  Google Scholar 

  24. C.A. Volkert, E.T. Lilleodden, Philos. Mag. 86 (33), 5567 (2006).

    Article  CAS  Google Scholar 

  25. D.I. Maio, S.G. Roberts, J. Mater. Res. 20 (2), 299 (2005).

    Article  CAS  Google Scholar 

  26. G. Cross, B. O’Conner, R.M. Langford, J. Pethica, Mater Res. Soc. Symp. Proc. 841, R1.6.1 (Warrendale, PA, 2005).

    Google Scholar 

  27. K.J. Kang, S. Darzens, G.S. Choi, J. Eng. Mater. Technol. 126, 457 (2004).

    Article  CAS  Google Scholar 

  28. P. Jud, P.M. Nellen, U. Sennhauser, Adv. Eng. Mater. 7 (5), 384 (May 2005).

    Article  CAS  Google Scholar 

  29. P.M. Nellen, V. Callegari, R. Brönnimann, Microelectron. Eng. 83, 1805 (2006).

    Article  CAS  Google Scholar 

  30. D.P. Adams, M.J. Vasile, T.M. Mayer, J. Vac. Sci. Technol. B 24 (4), 1766 (2006).

    Article  CAS  Google Scholar 

  31. M.J. Vasile, W. Zhang, J. Vac. Sci. Technol. B 17 (6), 3085 (1998).

    Article  Google Scholar 

  32. D.P. Adams, T.M. Mayer, M.J. Vasile, K. Archuelta, Appl. Surf. Sci. 252, 2432 (2006).

    Article  CAS  Google Scholar 

  33. E. Platzgummer et al., Microelectron. Eng. 83, 936 (2006).

    Article  CAS  Google Scholar 

  34. P.M. Nellen et al., in Mater Res. Soc. Symp. Proc. 983E (2006) paper no. 0960-N10-03-LL06-03.

  35. J.F. Ziegler, J.P. Biersack, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985).

    Google Scholar 

  36. M.H. Mendenhall, R.A. Weller, Nucl. Instrum. Methods Phys. Res. 227, 420 (2005).

    Article  CAS  Google Scholar 

  37. S. Rusponi, G. Costantini, F. Buatier de Mongeot, U. Valbusa, Appl. Phys. Lett. 75 (21), 3318 (1999).

    Article  CAS  Google Scholar 

  38. N.P. Hung, Y.Q. Fu, M.Y. Ali, J. Mater. Process. Technol. 5763, 1 (2002).

    Google Scholar 

  39. A.M. Minor, V.R. Radmilovic, E.A. Stach, T. Schenkel, Microsc. Microanal. 10, 1118 (2004).

    Article  Google Scholar 

  40. R.M. Langford, T.-X. Wang, J. Nanosci. Nanotechnol. 6 (9), 343 (2006).

    Google Scholar 

  41. J. Nilsson, J.R.I. Lee, T.V. Ratto, S.E. Letant, Adv. Mater. 18, 427 (2006).

    Article  CAS  Google Scholar 

  42. H.-X. Wei, R.M. Langford, X.-F. Han, J.M.D. Coey, Appl. Phys. Lett., 99 (8), 501 (2006).

    Google Scholar 

  43. A.-L. Biance et al., Microelectron. Eng. 83, 1474 (2006).

    Article  CAS  Google Scholar 

  44. T. Nagase, K. Gamo, T. Kubota, S. Mashiko, Micro. Elec. 78, 253 (2005).

    Google Scholar 

  45. V. Hodzic, J. Orloff, C.C. Davis, J. Lightwave Technology 6 (22), 209 (2004).

    Google Scholar 

  46. J. Reiner, P. Nellen, U. Sennhauser, Microelectron. Reliability 44 (9), 1583 (2004).

    CAS  Google Scholar 

  47. T.J. Colla, H.M. Urbassek, Phys. Rev. B 6310 (10), 2002 (2001).

    Google Scholar 

  48. U. Müller, U. Sennhauser, F. Hernández-Ramírez, Appl. Surf. Sci. (2006) submitted.

  49. J. Gierak, A. Septier, C. Vieu, Nucl. Instrum. Methods Phys. Res. Sect. B 127, 893 (1997).

    Google Scholar 

  50. R.L. Kubena et al., J. Vac. Sci. Technol. B 9, 3079 (1991).

    Article  Google Scholar 

  51. J. Taniguchi, K. Koga, Y. Koga, I. Miyamoto, Microelectron. Eng. 83, 940 (2006).

    Article  CAS  Google Scholar 

  52. R.M. Langford, A.K. Petford-Long, M. Rommeswinkle, S. Egelkamp, Mater. Sci. Technol. 18, 743 (2002).

    Article  CAS  Google Scholar 

  53. S.F. Gilmartin et al., Microelectron. Eng. 83, 823 (2006).

    Article  CAS  Google Scholar 

  54. C.Y. Liu, A. Datta, Y.L. Wang, Appl. Phys. Lett. 78 (1), 120 (2001).

    Article  CAS  Google Scholar 

  55. A. Perez et al., New J. Phys. 4, 76.1 (2002).

    Article  Google Scholar 

  56. M.V. Rastei et al., J. Magn. Magn. Mater. 286, 10 (2005).

    Article  CAS  Google Scholar 

  57. T.E. Vandervelde et al., J. Vac. Sci. Technol. A, 24 (2), 375 (2006).

    Article  CAS  Google Scholar 

  58. Y.T. Sun et al., Appl. Phys. Lett. 79 (12), 1185 (2001).

    Article  CAS  Google Scholar 

  59. V. Callegari, P.M. Nellen, Phys. Status Solidi A (2006) submitted.

  60. Y.Z. Huang, Appl. Phys. Lett. 88, 103104 (2004).

    Article  CAS  Google Scholar 

  61. A. Lugstein, J. Bernardi, C. Tomastok, E. Bertagnolli, Appl. Phys. Lett. 88, 163114 (2006).

    Article  CAS  Google Scholar 

  62. N. Nitta, M. Taniwaki, Nucl. Instrum. Methods Phys. Res. Sect. B 24, 234 (2004).

    Google Scholar 

  63. A.D. Wieck, K. Ploog, Appl. Phys. Lett., 56, 928 (1990).

    Article  CAS  Google Scholar 

  64. T.W. Kim et al., Solid State Commun. 115, 77 (2000).

    Article  CAS  Google Scholar 

  65. W.F. Tseng, D.H. Monk, Mater. Lett. 40, 235 (1999).

    Article  CAS  Google Scholar 

  66. S. Nakata, Phys. Rev. B 46, 13326 (1992).

    Article  CAS  Google Scholar 

  67. C. Shen et al., IEEE Trans. Electron Dev. 45 (2), 453 (1998).

    Article  CAS  Google Scholar 

  68. A.J. Steckl et al., J. Vac. Sci. Technol. B 13 (6), 2570 (1995).

    Article  CAS  Google Scholar 

  69. D.H. Naghski, J.T. Boyd, H.E. Jackson, A.J. Steckl, Opt. Commun. 150 (6), 97 (1998).

    Article  CAS  Google Scholar 

  70. T. Goto et al. Appl. Sur. Sci. 159, 277 (2000).

    Article  Google Scholar 

  71. J.H. Thompson et al., J. Appl. Phys. 74, 4375 (2005).

    Article  Google Scholar 

  72. S.1. Woods et al., Appl. Phys. Lett. 81, 1267 (2002).

    Article  CAS  Google Scholar 

  73. C. Chappert et al., Science 280, 1919 (1998).

    Article  CAS  Google Scholar 

  74. N. Owen, H.-Y. Yuen, A. Petford-Long, IEEE Trans. On Magn., 38 (5), 202 (2002).

    Article  CAS  Google Scholar 

  75. J. Fassbender et al., Phys. Status Solidi A 189, 439 (2001).

    Article  Google Scholar 

  76. P. Warin et al., J. Appl. Phys. 90, 3850 (2001).

    Article  CAS  Google Scholar 

  77. C. Vieu et al., Phys. Rev. Lett. 81, 5656 (1998).

    Article  Google Scholar 

  78. D. McGrouther, J.N. Chapman, Appl. Phys. Lett. 87, 22507 (2005).

    Article  CAS  Google Scholar 

  79. R.M. Langford, T.-X. Wang, A. Heidelberg, J.G. Sheridan, J. Vac. Sci. Technol. B 24, 2306 (2006).

    Article  CAS  Google Scholar 

  80. A. Hall et al., Appl. Phys. Lett. 82, 2506 (2003).

    Article  CAS  Google Scholar 

  81. Z. Deng et al., Appl. Phys. Lett. 88, 23119 (2006).

    Article  CAS  Google Scholar 

  82. H.X. Wei et al., J. Magn. Magn. Mater. 303 (2), 208 (August 2006).

    Article  CAS  Google Scholar 

  83. K. Shigeto et al., Microelectron. Eng. 83, 1471 (2006).

    Article  CAS  Google Scholar 

  84. L. Bischoff, B. Schmidt, Ch. Akhmadaliev, A. Mucklich, Microelectron. Eng. 83, 800 (2006).

    Article  CAS  Google Scholar 

  85. D. Reuter et al., Mater. Sci. Eng. 23, 456 (2001).

    Google Scholar 

  86. J.L. Hanssen, E.A. Dakin, J.J. McClelland, J. Vac. Sci. Technol. B 24 (6), 2907 (2006).

    Article  CAS  Google Scholar 

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Authors
  1. Richard M. Langford
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  2. Philipp M. Nellen
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  3. Jacques Gierak
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  4. Yongqi Fu
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Langford, R.M., Nellen, P.M., Gierak, J. et al. Focused Ion Beam Micro- and Nanoengineering. MRS Bulletin 32, 417–423 (2007). https://doi.org/10.1557/mrs2007.65

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