Abstract
One of the most important applications of a focused ion beam (FIB) workstation is preparing samples for transmission electron microscope (TEM) investigation. Samples must be uniformly thin to enable the analyzing beam of electrons to penetrate. The FIB enables not only the preparation of large, uniformly thick, sitespecific samples, but also the fabrication of lamellae used for TEM samples from composite samples consisting of inorganic and organic materials with very different properties. This article gives an overview of the variety of techniques that have been developed to prepare the final TEM specimen. The strengths of these methods as well as the problems, such as FIB-induced damage and Ga contamination, are illustrated with examples. Most recently, FIB-thinned lamellae were used to improve the spatial resolution of electron backscatter diffraction and energy-dispersive x-ray mapping. Examples are presented to illustrate the capabilities, difficulties, and future potential of FIB.
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References
L.A Giannuzzi, F.A. Stevie, Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice (Springer, New York, 2005).
E.C. Kirk et al., Inst. Phys. Conf. Series 100, 501 (1989).
D. Basile et al., Mater. Res. Soc. Symp. Proc. 254 (Materials Research Society, Pittsburgh, PA, 1992) pp. 23–41.
M.H.F. Overwijk, F.C. van den Heuvel, C.W.T. Bull-Lieuwma, J. Vac. Sci. Technol., B 11, 2021 (1993).
L.A. Giannuzzi et al., Mater. Res. Soc. Symp. Proc. 480 (Materials Research Society, Warrendale, PA, 1997) pp. 19–27.
T. Yaguchi, T. Kamino, T. Ishitani, R. Urao, Microsc. Microanal. 5, 363 (1999).
L.A. Giannuzzi, R. Geurts, J. Ringnalda, Microsc. Microanal. 11 suppl. 2, 828 (2005).
L.A. Giannuzzi, F.A. Stevie, Micron 30, 197 (1999).
F.A. Stevie et al., Surf. Interface Anal. 23, 61 (1995).
R.M. Anderson, Mater. Res. Soc. Symp. Proc. 254 (Materials Research Society, Pittsburgh, PA, 1992) pp. 141–148.
R.M. Anderson, S.J. Klepeis, Mater. Res. Soc. Symp. Proc. 480 (1997) p. 187.
R.M. Langford, D. Ozkaya, B. Huey, A.K. Petford-Long, Proc. Royal Microsc. Soc.: Microscopy of Semiconducting Materials XII (2001) pp. 511–514.
R.J. Young, P.D. Carleson, T. Hunt, J.F. Walker, Proc. 24th ISTFA Conf. (1998) p. 329.
R.J. Young, Microsc. Microanal. Proc. (2000, vol. 6, suppl. 2) p. 512.
M.V. Moore, Microsc. Microanal. Proc. (2002, vol. 8, suppl. 2) p. 60.
R.M. Langford et al., J. Vac. Sci. Technol. B 19 (3), 755 (May/June 2001).
T. Kamino et al., J. Electron Microsc. 53 (6), 583 (2004).
T. Kamino et al., J. Electron Microsc. 53 (5), 563 (2004).
T. Ohnishi et al., Proc. 25th Int. Symp. Testing and Failure Analysis (November 1999) pp. 449–501.
L.A. Giannuzzi et al., in Analysis Techniques of Submicron Defects, 2002 Supplement to the EDFAS Failure Analysis Desktop Reference (ASM International, Materials Park, Ohio, 2002) pp. 29–35.
S.M. Schwarz, B.W. Kempshall, L.A. Giannuzzi, Acta Mater. 51, 2765 (2003).
T. Kamino et al., J. Electron Microsc. 53 (5), 459 (2004).
J.P. McCaffrey, M.W. Phaneuf, L.D. Madsen, Ultramicroscopy 87, 97 (2001).
Z. Wanga et al., Appl. Surf. Sci. 241, 80 (2005).
K. Thompson et al., Microsc. Microanal. 12 suppl. 2, 1736CD (2006).
Z. Huang, J. Microsc. 215, 219 (2004).
N.I. Kato, J. Electron Microsc. 53, 451 (2004).
J.D. Casey et al., J. Vac. Sci. Technol. B 20, 2682 (2002).
J.R. Michael, Microsc. Microanal. 12 suppl. 2, 1248CD (2006).
R. Spolenak, L. Sauter, C. Eberl, Scripta Mater. 53, 1292 (2005).
S. Olliges et al., Acta Mater. 54, 5393 (2006).
J.H. Westbrook, Ed. Moffatt’s Handbook of Binary Phase Diagrams (Genium Group, Amsterdam, NY, 2004) p. 2/94.
F.A. Stevie et al., Surf. Interface Anal. 31, 345 (2001).
W. Henschel et al., J. Vac. Sci. Technol., B 21, 2975 (2003).
J. Mayer, T.E. Weirich, Microsc. Microanal. 11 suppl. 2, 46 (2005).
J.K. Lomness, L.A. Giannuzzi, M.D. Hampton, Microsc. Microanal. 7, 418 (2001).
C.R. Perrey et al., J. Microsc. 214, 222 (2004).
M. Marko et al., J. Microsc. 222, 42 (2006).
V.G.M. Sivel et al., J. Microsc. 218, 115 (2005).
M.K. Miller, K.F. Russell, G.B. Thompson, Ultramicroscopy 102, 287 (2005).
D.J. Larson et al., Ultramicroscopy 75, 147 (1998).
D.J. Larson et al., Ultramicroscopy 79, 287 (1999).
D.J. Larson, A.K. Petford-Long, Y.Q. Ma, A. Cerezo, Acta Mater. 52, 2847 (2004).
F. Pérez-Willard et al., Condens. Matter, 0601543 (2006).
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Mayer, J., Giannuzzi, L.A., Kamino, T. et al. TEM Sample Preparation and FIB-Induced Damage. MRS Bulletin 32, 400–407 (2007). https://doi.org/10.1557/mrs2007.63
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DOI: https://doi.org/10.1557/mrs2007.63