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Three-Dimensional Microfabrication by Two-Photon Lithography

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Abstract

The controlled formation of submicrometer-scale structures in three dimensions is of increasing interest in many applications. Not intended to produce the smallest structures, but instead aimed at complex topographies, two-photon lithography is an intrinsic 3D lithography technique that enables the fabrication of structures difficult to access by conventional single-photon processes with far greater spatial resolution than other 3D microfabrication techniques. By tightly focusing a femtosecond laser beam into a resin, subsequent photo-induced reactions such as polymerization occur only in the close vicinity of the focal point, allowing the fabrication of a 3D structure by directly writing 3D patterns. The current research effort in two-photon lithography is largely devoted to the design and synthesis of high-efficiency photoinitiators and sensitizers, as well as the development of new materials and systems. This article provides an overview of the progress in two-photon processes for the formation of complex images and the development of patterned structures.

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Authors
  1. Da Yang
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  2. Shalin J. Jhaveri
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  3. Christopher K. Ober
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Yang, D., Jhaveri, S.J. & Ober, C.K. Three-Dimensional Microfabrication by Two-Photon Lithography. MRS Bulletin 30, 976–982 (2005). https://doi.org/10.1557/mrs2005.251

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