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References
J.S. Burdess A.J. Harris D. Wood R.J. Pitcher and D. Glennie IEEE/ASME J.MEMS 6 (1997) p.322.
C.H. Liu A.M. Barzilai J.K. Reynolds A. Partridge T.W. Kenny J.D. Grade and H.K. Rockstad IEEE/ASME J.MEMS 7 (1998) p.235.
D.J. Burns and H.F. Helbig IEEE/ASME J.MEMS 8 (1999) p.473.
B.K.P. Horn Robot Vision (MIT Press, Cambridge, MA, 1986).
C.Q. Davis and D.M. Freeman Opt. Eng. 37 (1998) p.1290.
D.M. Freeman and C.Q. Davis in Proc. Solid-State Sensor and Actuator Workshop 1996 (Transducer Research Foundation, Cleveland) p. 161.
D.M. Freeman A.J. Aranyosi M.J. Gordon and S.S. Hong in Proc. Solid-State Sensor and Actuator Workshop 1998 (Transducer Research Foundation, Cleveland) p.150.
C.Q. Davis and D.M. Freeman Opt. Eng. 37 (1998) p.1299.
R.C. Gutierrez K.V. Shcheglov and T.K. Tang in Proc. Solid-State Sensor and Actuator Workshop 1998 (Transducer Research Foundation, Cleveland) p.324.
W. Hemmert M.S. Mermelstein and D.M. Freeman in Proc. MEMS ’99 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p.302.
M.R. Hart R.A. Conant K.Y. Lau and R.S. Muller in Proc. Transducers ’99 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p.470.
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Freeman, D.M. Measuring Motions of MEMS. MRS Bulletin 26, 305–306 (2001). https://doi.org/10.1557/mrs2001.66
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DOI: https://doi.org/10.1557/mrs2001.66