References
R.S. Payne in Proc. 13th Int. Conf. on MEMS, edited by I. Shimoyama and H. Kuwano (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p.7.
W. Nelson Accelerated Testing: Statistical Models, Test Plans, and Data Analyses (Wiley, New York, 1990).
F.R. Nash Estimating Device Reliability: Assessment of Credibility (Kluwer Academic Publishers, Boston, 1993).
M. Ohring Reliability and Failure of Electronic Materials and Devices (Academic Press, Boston, 1998).
S. Cruzel D. Esteve M. Dilhan J.Y. Fourniols F. Pressecq O. Puig and J.J. Simonne in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Belling-ham, WA, 1999) p.148.
B. Michel in Proc. Micro System Technologies 98, edited by H. Reichl and E. Obermeier (VDE Verlag, Berlin, 1998) p.403.
Military Handbook (MIL-HDBK-217F) Reliability Prediction of Electronic Equipment (Department of Defense, Washington, DC, 1991).
N.F. Smith W.P. Eaton D.M. Tanner and J.J. Allen, in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.156.
S.T. Patton W.D. Cowan and J.S. Zabinski in Proc. 37th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p.179.
K.L. Turner S.A. Miller P.G. Hartwell N.C. MacDonald S.H. Strogatz and S.G. Adams Nature 396 (1998) p.149.
R.A. Lawton M. Abraham and E. Lawrence in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.46.
A. Gasparyan V. Aksyuk P. Busch and S. Arney in Proc. SPIE MEMS Reliability for Critical and Space Applications, Vol. 4180, edited by R.A. Lawton (SPIE—The International Society for Optical Engineering, Bellingham, WA, 2000) p.86.
D.M. Freeman A.J. Aranyosi M.J. Gordon and S.S. Hong in Tech. Dig. 1998 Solid-State Sensor and Actuator Workshop (Transducer Research Foundation, Cleveland, 1998) p.150.
C. Rembe M. Hart M. Helmbrecht U. Srinivasan R.S. Muller K.Y. Lau and R.T. Howe in Proc. 2000 IEEE/LEOS Int. Conf. Optical MEMS (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p.73.
G.C. Brown R.J. Pryputniewicz M.P. de Boer, and N. Smith in Materials Science of Micro-electromechanical Systems (MEMS) Devices II, edited by M.P. de Boer, A.H. Heuer S.J. Jacobs and E. Peeters (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p.163.
M.P. de Boer, J.A. Knapp T.A. Michalske U. Srinivasan and R. Maboudian Acta Mater. 48 (2000) p.4531.
C. Rembe H. Aschemann S. aus der Wiesche, E.P. Hofer H. Debede J. Mohr, and U. Wallrabe in Proc. 38th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p.123.
R. Kazinczi J.R. Mollinger and A. Bossche Sens. Actuators A 85 (1-3) (2000) p.84.
D. Meunier R. Desplats J. Benbrik G. Perez C. Pellet D. Etseve and B. Bente Micro-electron. Reliability 38 (6-8) (1998) p.1265.
MEMS Reliability Assurance Guideline for Space Applications, edited by B. Stark JPLPubli-cation 99-1 (Jet Propulsion Laboratory, Pasadena, CA, 1999).
D.M. Tanner N.F. Smith L.W. Irwin W.P. Eaton K.S. Helgesen J.J. Clement W.M. Miller J.A. Walraven K.A. Peterson P. Tangyunyong M.T. Dugger and S.L. Miller MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes (Sandia National Laboratories, Albuquerque, NM, 2000).
S.B. Brown W. Van Arsdell, and C.L. Muhlstein in Digest of Technical Papers, Int. Conf. Solid-State Sensors and Actuators (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1997) p.591.
S.B. Brown and E. Jansen in 1996 Digest IEEE/LEOS Summer Topical Meetings on Optical MEMS and Their Applications (Institute of Electrical and Electronics Engineers, Piscataway, NJ) p.9.
M.R. Douglass in Proc. 36th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998) p.9.
S.L. Miller M.S. Rodgers G. LaVigne J.J. Sniegowski P. Clews D.M. Tanner and K.A. Peterson in Proc. 36th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998) p. 17.
D.M. Tanner W.M. Miller W.P. Eaton L.W. Irwin K.A. Peterson M.T. Dugger D.C. Senft N.F. Smith P. Tangyunyong and S.L. Miller in Proc. 36th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998) p.26.
K.M. Delak P. Bova A.L. Hartzell and D.J. Woodilla in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.165.
R. Ramesham R. Ghaffarian and N.P. Kim in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.83.
K.F. Man in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.120.
R. Ghaffarian in Proc. 2000 ASME Int. Mechanical Engineering Congress and Exposition MEMS-2, edited by A. Lee F. Forster R. Keynton A.P. Malshe and Q. Tan (American Society of Mechanical Engineers, New York, 2000) p. 623.
K. Gilleo in Proc. 2000 ASME Int. Mechanical Engineering Congress and Exposition MEMS-2, edited by A. Lee F. Forster R. Keynton A.P. Malshe and Q. Tan (American Society of Mechanical Engineers, New York, 2000) p.615.
K.E. Petersen Proc. IEEE 70 (5)(1982) p.420.
D.M. Tanner J.A. Walraven K.S. Helgesen L.W. Irwin D.L. Gregory J.R. Stake and N.F. Smith in Proc. 38th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p.139.
D.M. Tanner J.A. Walraven K.S. Helgesen L.W. Irwin F.A. Brown N.F. Smith and N. Masters in Proc. 38th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p.129.
W.W. Van Arsdell and S.B. Brown IEEE/ASME J.MEMS 8 (3)(1999) p.319.
M.T. Saif and N.C. MacDonald in Tech. Dig. Transducers ’95/EuroSensors IX, Vol. 2 (Foundation for Sensor and Actuator Technology, Stockholm, 1995) p.60.
R. Prasad N. MacDonald and D. Taylor in Tech. Dig. Transducers ’95/EuroSensors IX, Vol. 2 (Foundation for Sensor and Actuator Technology, Stockholm, 1995) p.53.
P. Nieva, H. Tada P. Zavracky G. Adams I. Miaoulis and P. Wong in Materials Science of Microelectromechanical Systems (MEMS) Devices, edited by A.H. Heuer and S.J. Jacobs (Mater. Res. Soc. Symp. Proc. 546, Warrendale, PA, 1999) p.97.
H. Guckel in Materials Science of Micro-electromechanical Systems (MEMS) Devices II, edited by M.P. de Boer, A.H. Heuer S.J. Jacobs and E. Peeters (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p.3.
M. Sekimoto H. Yoshihara and T. Ohkubo J.Vac. Sci. Technol. 21 (4)(1982) p.1017.
J. Yang H. Kahn A.Q. He S.M. Phillips and A.H. Heuer IEEE/ASME J. MEMS 9 (December 2000) p.485.
V.A. Aksyuk F. Pardo and D.J. Bishop in SPIE Symp. on Design, Test, and Microfabrication of MEMS and MOEMS, Vol. 3680, edited by B. Courtois S.B. Crary W. Ehrfeld H. Fujita J.-M. Karam and K. Markus (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.984.
R. Maboudian and R.T. Howe J. Vac. Sci. Technol., B 15 (1)(1997) p.1.
I. Jafri H. Busta and S. Walsh in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.51.
R.C. Kullberg in Proc. SPIE MEMS Reliability for Critical Applications, Vol. 3880, edited by R.A. Lawton W.M. Miller G. Lin and R. Ramesham (SPIE—The International Society for Optical Engineering, Bellingham, WA, 1999) p.75.
D.M. Tanner J.A. Walraven L.W. Irwin M.T. Dugger N.F. Smith W.P. Eaton W.M. Miller and S.L. Miller in Proc. 37th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p.189.
S.S. Mani J.G. Fleming J.A. Walraven J.J. Sniegowski de Boer M.P., L.W. Irwin D.M. Tanner D.A. LaVan M.T. Dugger J. Jakubczak, and W.M. Miller in Proc. 38th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p.146.
H.R. Shea A. Gasparyan C.D. White R.B. Comizzoli D. Abusch-Magder, and S. Arney in Proc. SPIE MEMS Reliability for Critical and Space Applications, Vol. 4180, edited by R.A. Lawton (SPIE—The International Society for Optical Engineering, Bellingham, WA, 2000) p.117.
K.M. Frederick and G.K. Fedder in Proc. SPIE MEMS Reliability for Critical and Space Applications, Vol. 4180, edited by R.A. Lawton (SPIE—The International Society for Optical Engineering, Bellingham, WA, 2000) p.108.
J.A. Walraven J.M. Soden E.I. Cole Jr., L.W. Irwin and D.M. Tanner in Proc. SPIE MEMS Reliability for Critical and Space Applications, Vol. 4180, edited by R.A. Lawton (SPIE—The International Society for Optical Engineering, Bellingham, WA, 2000) p.30.
D.M. Burns and V.M. Bright in Digest of Technical Papers, Int. Conf. Solid-State Sensors and Actuators, Vol.2 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1997) p. 335.
A. Agarwal S. Arney B. Barber S. Kosinski J. LeGrange R. Raju and R. Ruel in Proc. 37th IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p.198.
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Arney, S. Designing for MEMS Reliability. MRS Bulletin 26, 296–299 (2001). https://doi.org/10.1557/mrs2001.63
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DOI: https://doi.org/10.1557/mrs2001.63