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Surface Micromachining: A Brief Introduction

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References

  1. A.E. Franke Y. Jaio M.T. Wu T.J. King and R.T. Howe in Tech. Digest Solid-State Sensor and Actuator Workshop (Transducer Research Foundation, Cleveland, 2000) p. 18.

    Google Scholar 

  2. A.J. Fleischman X. Wei C.A. Zorman and M. Mehregany Mater. Sci. Forum 264-268 (1998) p. 885.

    Google Scholar 

  3. S. Roy A.K. McIlwain R.G. DeAnna A.J. Fleischman R.K. Burla C.A. Zorman and M. Mehregany in Tech. Digest Solid-State Sensor and Actuator Workshop (Transducer Research Foundation, Cleveland, 2000) p. 22.

    Google Scholar 

  4. A.A. Yasseen C.A. Zorman and M. Mehregany IEEE/ASME J. MEMS 8 (1999) p. 237.

    Google Scholar 

  5. A.A. Yasseen C.H. Wu C.A. Zorman and M. Mehregany IEEE Electron Dev. Lett. 21 (2000) p. 164.

    Google Scholar 

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Authors
  1. Mehran Mehregany
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  2. Christian A. Zorman
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Mehregany, M., Zorman, C.A. Surface Micromachining: A Brief Introduction. MRS Bulletin 26, 289–290 (2001). https://doi.org/10.1557/mrs2001.61

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