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Microelectro-mechanical Systems: Technology and Applications

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Authors
  1. David Bishop
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  2. Arthur Heuer
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  3. David Williams
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Bishop, D., Heuer, A. & Williams, D. Microelectro-mechanical Systems: Technology and Applications. MRS Bulletin 26, 282–288 (2001). https://doi.org/10.1557/mrs2001.60

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  • DOI: https://doi.org/10.1557/mrs2001.60

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